Comparison and analysis of capacitive humidity sensors with water vapor inlet holes of different depths

Kyo Sang Choi; Deok Su Kim; Hee June Yang; Min Soo Ryu; Ji Sung Chae; Sung Pil Chang

doi:10.1117/1.JMM.14.2.025001

9 April 2015 Comparison and analysis of capacitive humidity sensors with water vapor inlet holes of different depths

Kyo Sang Choi, Deok Su Kim, Hee June Yang, Min Soo Ryu, Ji Sung Chae, Sung Pil Chang

Author Affiliations +
Kyo Sang Choi,¹ Deok Su Kim,¹ Hee June Yang,¹ Min Soo Ryu,¹ Ji Sung Chae,¹ Sung Pil Chang¹

¹Inha Univ. (Korea, Republic of)

Funded by: Ministry of Education, National Research Foundation of Korea (NRF)

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 14, Issue 2, 025001 (April 2015). https://doi.org/10.1117/1.JMM.14.2.025001

ARTICLE

1 Introduction

2 Humidity Sensor Design and Fabrication

3 Results and Discussion

3.1 Sensitivity

3.2 Hysteresis

3.3 Stabilities

3.4 Response Time

4 Conclusion

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Abstract

This paper describes the design, fabrication, and characterization of a capacitive humidity sensor with water vapor inlet holes of different depths. The humidity sensors were composed of a SiO₂ insulation layer, a bottom electrode, a polyimide (PI) sensing layer, and a top electrode containing water vapor inlet holes. The sensors were 3.5 mm×3.5 mm with a 0.7-μm thick PI-based sensing layer. A humidity sensor with a partially etched PI layer in the water vapor inlet holes had the following characteristics: sensitivity 1500 fF/%RH, hysteresis 0.37%, and a response time of 70 s.

© 2015 Society of Photo-Optical Instrumentation Engineers (SPIE) 1932-5150/2015/$25.00 © 2015 SPIE

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Kyo Sang Choi, Deok Su Kim, Hee June Yang, Min Soo Ryu, Ji Sung Chae, and Sung Pil Chang "Comparison and analysis of capacitive humidity sensors with water vapor inlet holes of different depths," Journal of Micro/Nanolithography, MEMS, and MOEMS 14(2), 025001 (9 April 2015). https://doi.org/10.1117/1.JMM.14.2.025001

Published: 9 April 2015

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KEYWORDS

Sensors

Humidity

Electrodes

Dielectrics

Etching

Capacitance

Photoresist materials

Microelectromechanical systems

Double patterning technology

Manufacturing

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Kyo Sang Choi, Deok Su Kim, Hee June Yang, Min Soo Ryu, Ji Sung Chae, Sung Pil Chang, "Comparison and analysis of capacitive humidity sensors with water vapor inlet holes of different depths," J. Micro/Nanolith. MEMS MOEMS 14(2) 025001 (9 April 2015) https://doi.org/10.1117/1.JMM.14.2.025001

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