Creation of guiding patterns for directed self-assembly of block copolymers by resistless direct e-beam exposure

Laura Evangelio; Marta Fernández-Regúlez; Xavier Borrisé; Matteo Lorenzoni; Jordi Fraxedas; Francesc Pérez-Murano

doi:10.1117/1.JMM.14.3.033511

21 September 2015 Creation of guiding patterns for directed self-assembly of block copolymers by resistless direct e-beam exposure

Laura Evangelio, Marta Fernández-Regúlez, Xavier Borrisé, Matteo Lorenzoni, Jordi Fraxedas, Francesc Pérez-Murano

Author Affiliations +

Funded by: European Union’s Seventh Framework Programme, European Research Council, European Community's Seventh Framework Programme, European Community’s Seventh Framework Programme, European Union Seventh Framework Programme, European Union Seventh Framework Program, EC and Spanish Ministry, Seventh Framework Programme (EC Seventh Framework Programme), European Nanoelectronics Initiative Advisory Council (ENIAC), MECD

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 14, Issue 3, 033511 (September 2015). https://doi.org/10.1117/1.JMM.14.3.033511

Abstract

We present an approach for the creation of guiding patterns to direct the self-assembly of block copolymers. A neutral layer of a brush polymer is directly exposed by electrons, causing the cross-linking of the brush molecules, and thus changing its local affinity. The advantage relies on the achievable resolution and the reduction of the process steps in comparison with deep UV and conventional electron beam lithography, since it avoids the use of a resist. We envision that this method will be highly valuable for the investigation of high-chi directed self-assembly materials and complex guiding pattern designs, where pattern placement and resolution are becoming critical.

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Laura Evangelio, Marta Fernández-Regúlez, Xavier Borrisé, Matteo Lorenzoni, Jordi Fraxedas, and Francesc Pérez-Murano "Creation of guiding patterns for directed self-assembly of block copolymers by resistless direct e-beam exposure," Journal of Micro/Nanolithography, MEMS, and MOEMS 14(3), 033511 (21 September 2015). https://doi.org/10.1117/1.JMM.14.3.033511

Published: 21 September 2015

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