Thermo-optical optimization of extreme-ultraviolet pellicles for future generations

Eun-Sang Park; Chung-hyun Ban; Jae-Hun Park; Hye-Keun Oh

doi:10.1117/1.JMM.16.4.041014

29 December 2017 Thermo-optical optimization of extreme-ultraviolet pellicles for future generations

Eun-Sang Park, Chung-hyun Ban, Jae-Hun Park, Hye-Keun Oh

Author Affiliations +

Funded by: Ministry of Trade, Industry and Energy, Korea, Ministry of Trade, Industry and Energy and Korea Semiconductor Research Consortium, Korea Semiconductor Research Consortium (KSRC)

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 16, Issue 4, 041014 (December 2017). https://doi.org/10.1117/1.JMM.16.4.041014

Abstract

The thermo-optical optimization of extreme-ultraviolet pellicles for 3 nm node or smaller is described. Various material and multilayer structure candidates for the optimized pellicles are simulated using a finite element method. The result shows that a silicon-cored pellicle has relatively high transmission, whereas a graphene-cored pellicle shows relatively low stress compared with its material tensile strength.

Citation Download Citation

Eun-Sang Park, Chung-hyun Ban, Jae-Hun Park, and Hye-Keun Oh "Thermo-optical optimization of extreme-ultraviolet pellicles for future generations," Journal of Micro/Nanolithography, MEMS, and MOEMS 16(4), 041014 (29 December 2017). https://doi.org/10.1117/1.JMM.16.4.041014

Received: 29 April 2017; Accepted: 30 November 2017; Published: 29 December 2017

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