Evaluating the effects of modeling errors for isolated finite three-dimensional targets

Mark-Alexander Henn; Bryan M. Barnes; Hui Zhou

doi:10.1117/1.JMM.16.4.044001

19 October 2017 Evaluating the effects of modeling errors for isolated finite three-dimensional targets

Mark-Alexander Henn, Bryan M. Barnes, Hui Zhou

Author Affiliations +

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 16, Issue 4, 044001 (October 2017). https://doi.org/10.1117/1.JMM.16.4.044001

Abstract

Optical three-dimensional (3-D) nanostructure metrology utilizes a model-based metrology approach to determine critical dimensions (CDs) that are well below the inspection wavelength. Our project at the National Institute of Standards and Technology is evaluating how to attain key CD and shape parameters from engineered in-die capable metrology targets. More specifically, the quantities of interest are determined by varying the input parameters for a physical model until the simulations agree with the actual measurements within acceptable error bounds. As in most applications, establishing a reasonable balance between model accuracy and time efficiency is a complicated task. A well-established simplification is to model the intrinsically finite 3-D nanostructures as either periodic or infinite in one direction, reducing the computationally expensive 3-D simulations to usually less complex two-dimensional (2-D) problems. Systematic errors caused by this simplified model can directly influence the fitting of the model to the measurement data and are expected to become more apparent with decreasing lengths of the structures. We identify these effects using selected simulation results and present experimental setups, e.g., illumination numerical apertures and focal ranges, that can increase the validity of the 2-D approach.

Citation Download Citation

Mark-Alexander Henn, Bryan M. Barnes, and Hui Zhou "Evaluating the effects of modeling errors for isolated finite three-dimensional targets," Journal of Micro/Nanolithography, MEMS, and MOEMS 16(4), 044001 (19 October 2017). https://doi.org/10.1117/1.JMM.16.4.044001

Received: 25 April 2017; Accepted: 29 September 2017; Published: 19 October 2017

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $24.00

Non-members: $28.00 ADD TO CART

JOURNAL ARTICLE
11 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

3D modeling

Indium arsenide

Polarization

Data modeling

3D acquisition

Metrology

3D metrology

Show All Keywords

Keywords/Phrases

Search In:

Publication Years