Parallel compression/decompression-based datapath architecture for multibeam mask writers

Narendra Chaudhary; Serap A. Savari

doi:10.1117/1.JMM.16.4.043503

7 November 2017 Parallel compression/decompression-based datapath architecture for multibeam mask writers

Narendra Chaudhary, Serap A. Savari

Author Affiliations +

Funded by: National Science Foundation, National Science Foundation NSF CBET

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 16, Issue 4, 043503 (November 2017). https://doi.org/10.1117/1.JMM.16.4.043503

Abstract

Multibeam electron beam systems will be used in the future for mask writing and for complementary lithography. The major challenges of the multibeam systems are in meeting throughput requirements and in handling the large data volumes associated with writing grayscale data on the wafer. In terms of future communications and computational requirements, Amdahl’s law suggests that a simple increase of computation power and parallelism may not be a sustainable solution. We propose a parallel data compression algorithm to exploit the sparsity of mask data and a grayscale video-like representation of data. To improve the communication and computational efficiency of these systems at the write time, we propose an alternate datapath architecture partly motivated by multibeam direct-write lithography and partly motivated by the circuit testing literature, where parallel decompression reduces clock cycles. We explain a deflection plate architecture inspired by NuFlare Technology’s multibeam mask writing system and how our datapath architecture can be easily added to it to improve performance.

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Narendra Chaudhary and Serap A. Savari "Parallel compression/decompression-based datapath architecture for multibeam mask writers," Journal of Micro/Nanolithography, MEMS, and MOEMS 16(4), 043503 (7 November 2017). https://doi.org/10.1117/1.JMM.16.4.043503

Received: 2 August 2017; Accepted: 17 October 2017; Published: 7 November 2017

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KEYWORDS

Photomasks

Clocks

Data communications

Logic

Data compression

Telecommunications

Digital electronics

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CHORUS Article. This article was made freely available starting 07 November 2018

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