Synergy of contact and noncontact techniques for design and characterization of vibrating MOEMS elements

Vytautas Ostasevicius; Sigitas Tamulevicius; Arvydas Palevicius; Minvydas Ragulskis; Viktoras Grigaliunas; Virgilijus Minialga

doi:10.1117/1.2107427

1 October 2005 Synergy of contact and noncontact techniques for design and characterization of vibrating MOEMS elements

Vytautas Ostasevicius, Sigitas Tamulevicius, Arvydas Palevicius, Minvydas Ragulskis, Viktoras Grigaliunas, Virgilijus Minialga

Author Affiliations +

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 4, Issue 4, 041602 (October 2005). https://doi.org/10.1117/1.2107427

Abstract

The investigation of dynamics of microelectromechanical systems (MEMS) and microoptoelectromechanical systems (MOEMS) is an important problem of engineering, technology, and metrology. Specifically, recent interest in applying MOEMS technology to the miniaturization of micromirrors, sensors, and actuators for variety of applications requires the design of appropriate testing and measurement tools for investigation of dynamic properties of those systems. Though MOEMS technology offers great promise in addressing the need for smaller dynamical systems, the development of new types of MOEMS structures is a very costly and complicated procedure. On the other hand, straight application of the principles of design of macromechanical systems is rather limited in MOEMS applications. Therefore, the application of measurement technologies capable of detecting the dynamic properties of microscale systems may help to understand and evaluate the functionality of the systems. Technological aspects of MOEMS design and methods of their characterization are presented.

©(2005) Society of Photo-Optical Instrumentation Engineers (SPIE)

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Vytautas Ostasevicius, Sigitas Tamulevicius, Arvydas Palevicius, Minvydas Ragulskis, Viktoras Grigaliunas, and Virgilijus Minialga "Synergy of contact and noncontact techniques for design and characterization of vibrating MOEMS elements," Journal of Micro/Nanolithography, MEMS, and MOEMS 4(4), 041602 (1 October 2005). https://doi.org/10.1117/1.2107427

Published: 1 October 2005

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