Novel microfabrication approach of embedded SU8TM fluidic networks for cell transport on chips

Alison Gracias; Xiaojun Feng; Bai Xu; James Castracane

doi:10.1117/1.2200674

1 April 2006 Novel microfabrication approach of embedded SU8^TM fluidic networks for cell transport on chips

Alison Gracias, Xiaojun Feng, Bai Xu, James Castracane

Author Affiliations +

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 5, Issue 2, 021102 (April 2006). https://doi.org/10.1117/1.2200674

Abstract

We focus on the development and fabrication of SU8^TM-based microchannel networks, which can be integrated into microdevices for fast drug delivery and cell transport on chips. Instead of using sacrificial materials or wafer bonding, a new simplified fabrication method is developed. Single- and double-layered SU8^TM channels on silicon substrates are successfully achieved by using this new method, as well as integration of these SU8 channels with microelectrode arrays. A series of cell transport experiments is also successfully performed on these devices. This new fabrication approach and the resulting cell transport experiments are discussed in detail.

©(2006) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Alison Gracias, Xiaojun Feng, Bai Xu, and James Castracane "Novel microfabrication approach of embedded SU8^TM fluidic networks for cell transport on chips," Journal of Micro/Nanolithography, MEMS, and MOEMS 5(2), 021102 (1 April 2006). https://doi.org/10.1117/1.2200674

Published: 1 April 2006

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