25 September 2024 Actinic inspection of the extreme ultraviolet optical parameters of lithographic materials enabled by a table-top, coherent extreme ultraviolet source
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Abstract

The interaction of extreme ultraviolet (EUV) light with matter is a critical step in EUV lithographic processes, and optimization of the optical material properties of all elements in the lithographic chain (from optical coatings and pellicles to photoresists) is crucial to harnessing the full power of EUV lithography. To optimize these materials, accurate measurements of EUV absorption and reflection are needed to extract the corresponding actinic optical properties and structural parameters. Here, we report on actinic EUV metrology-based absorption and reflection measurements enabled by coherent table-top EUV sources based on high-harmonic generation. We demonstrate the capabilities and flexibility of our setup with measurements on crystalline films, photoresist systems, and carbon nanotube membranes and provide extracted optical parameters, absorption kinetics, and 2D transmission maps, respectively. These results showcase the power of lab-based actinic inspection methods based on compact, coherent EUV sources for providing crucial data for material optimization and lithographic simulation.

© 2024 Society of Photo-Optical Instrumentation Engineers (SPIE)
Kevin M. Dorney, Fabian Holzmeier, Nicola N. Kissoon, Esben W. Larsen, Dhirendra P. Singh, Shikhar Arvind, Sayantani Santra, Roberto Fallica, Marina Y. Timmermans, Ivan Pollentier, Igor A. Makhotkin, Vicky Philipsen, Stefan De Gendt, Claudia Fleischmann, Paul A. W. van der Heide, and John S. Petersen "Actinic inspection of the extreme ultraviolet optical parameters of lithographic materials enabled by a table-top, coherent extreme ultraviolet source," Journal of Micro/Nanopatterning, Materials, and Metrology 23(4), 041406 (25 September 2024). https://doi.org/10.1117/1.JMM.23.4.041406
Received: 31 May 2024; Accepted: 28 August 2024; Published: 25 September 2024
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KEYWORDS
Extreme ultraviolet

Extreme ultraviolet lithography

Photoresist materials

Reflectivity

Ruthenium

EUV optics

Pellicles

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