Isopropanol/water as a developer for poly(dimethylglutarimide)

Robert William Johnstone; Ian G. Foulds; M. Pallapa; Ash M. Parameswaran

doi:10.1117/1.2990738

1 October 2008 Isopropanol/water as a developer for poly(dimethylglutarimide)

Robert William Johnstone, Ian G. Foulds, M. Pallapa, Ash M. Parameswaran

Author Affiliations +

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 7, Issue 4, 043006 (October 2008). https://doi.org/10.1117/1.2990738

Abstract

Poly(dimethylglutarimide) (PMGI) is a resist that is commonly used in bilayer and trilayer imaging applications. PMGI can be exposed using various radiation sources including deep UV. Currently, there are only two developers for PMGI reported in the literature: tetramethylammonium hydroxide and tetraethylammonium hydroxide. We introduce a new developer for PMGI, a mixture of isopropanol (IPA) and water. Samples were irradiated with deep UV at 254 nm. The IPA/water developer exhibits rapid dissolution of exposed PMGI, of many microns per minute. However, PMGI exhibits high absorption at 254 nm, so the development depth is limited. The depth limit, after a critical dose, increases linearly with the exposure dose.

©(2008) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Robert William Johnstone, Ian G. Foulds, M. Pallapa, and Ash M. Parameswaran "Isopropanol/water as a developer for poly(dimethylglutarimide)," Journal of Micro/Nanolithography, MEMS, and MOEMS 7(4), 043006 (1 October 2008). https://doi.org/10.1117/1.2990738

Published: 1 October 2008

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