Development of a Brewster's Angle Spectrophotometer

William E. Goetz; Ralph N. Jackson

doi:10.1117/12.7972294

1 December 1978 Development of a Brewster's Angle Spectrophotometer

William E. Goetz, Ralph N. Jackson

Author Affiliations +

Optical Engineering, Vol. 17, Issue 6, 176631 (December 1978). https://doi.org/10.1117/12.7972294

Abstract

A variety of reflectance techniques have been developed to determine the thickness of thin transparent films on silicon substrates 1,2 These techniques are based on the way incident radiation is reflected from air-film and film-substrate interfaces. These reflectance techniques are ideally suited to measuring films ranging in thickness from approximately 500 A to many thousands of angstroms. The absolute reflectivity technique measures the reflectance at several wavelengths and, by matching the curve as measured to the theoretical, the actual film thickness can be determined. A refined version of the absolute reflectivity technique is the Brewster's angle spectrophotometer. This article describes the development phase for an automatic Brewster's angle spectrophotometer and discusses the performance of the instrument. The optical and mechanical layouts and photographs depict the choice of implementation.

Citation Download Citation

William E. Goetz and Ralph N. Jackson "Development of a Brewster's Angle Spectrophotometer," Optical Engineering 17(6), 176631 (1 December 1978). https://doi.org/10.1117/12.7972294

Published: 1 December 1978

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available