Binary and multilevel diffractive lenses with submicrometer feature    sizes

Helmut Zarschizky; Albert Stemmer; Franz Mayerhofer; Guy Lefranc; Wolfgang Gramann

doi:10.1117/12.179886

1 November 1994 Binary and multilevel diffractive lenses with submicrometer feature sizes

Helmut Zarschizky, Albert Stemmer, Franz Mayerhofer, Guy Lefranc, Wolfgang Gramann

Author Affiliations +

Optical Engineering, Vol. 33, Issue 11, (November 1994). https://doi.org/10.1117/12.179886

Abstract

Binary and multilevel diffractive lenses with submicrometer feature sizes are realized on silicon and galliumphosphide wafers using CAD methods, direct write e-beam lithography, reactive ion etching, antireflection coating, and wafer dicing. Measurements prove aberration-free imaging and maximum diftraction efficiencies of 70% for lenses with high numerical aperture (NA) of 0.5. Comparisons to other miniature and micro-optical elements are carried out with respect to laser-to-single-mode-fiber coupling and show the competitive performance of the diffractive lenses. Arrays for 18-channel parallel receiver modules are fabricated in on-axis and off-axis versions. Optical crosstalk is estimated.

Citation Download Citation

Helmut Zarschizky, Albert Stemmer, Franz Mayerhofer, Guy Lefranc, and Wolfgang Gramann "Binary and multilevel diffractive lenses with submicrometer feature sizes," Optical Engineering 33(11), (1 November 1994). https://doi.org/10.1117/12.179886

Published: 1 November 1994

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