Analysis of 3-D surface waviness on standard artifacts by retroreflective metrology

XianZhu Zhang; Walter P. T. North

doi:10.1117/1.602350

1 January 2000 Analysis of 3-D surface waviness on standard artifacts by retroreflective metrology

XianZhu Zhang, Walter P. T. North

Optical Engineering, Vol. 39, Issue 1, (January 2000). https://doi.org/10.1117/1.602350

Retroreflective metrology has been used to measure the 3-D surface waviness on standard artifacts. An optical configuration was constructed for the measurement, in which the grating image is produced by projection. The three-step algorithm of phase-shifting technology was applied to analyze the image. Two standard artifacts with 8.0- and 16.0-µm peak-to-peak wave amplitudes were tested. The experiments show that retroreflective metrology can successfully recover the contour and amplitude of the surface waviness on the standard artifacts. Â© 2000 Society of Photo-Optical Instrumentation Engineers. [S0091-3286(00)02101-2]

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XianZhu Zhang and Walter P. T. North "Analysis of 3-D surface waviness on standard artifacts by retroreflective metrology," Optical Engineering 39(1), (1 January 2000). https://doi.org/10.1117/1.602350

Published: 1 January 2000

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