Direct shape measurement by digital wavefront reconstruction and multi-wavelength contouring

Chr. Wagner; Wolfgang Osten; Soenke Seebacher

doi:10.1117/1.602338

1 January 2000 Direct shape measurement by digital wavefront reconstruction and multi-wavelength contouring

Chr. Wagner, Wolfgang Osten, Soenke Seebacher

Optical Engineering, Vol. 39, Issue 1, (January 2000). https://doi.org/10.1117/1.602338

We present a direct holographic multiwavelength contouring technique for shape measurement of microcomponents with large height steps and/or spatially isolated object areas. The measurement is based on the digital recording and reconstruction of wavefronts using a CCD sensor. Absolute phase measurement is ensured by multiwavelength contouring. Consequently the whole measurement procedure delivers a direct and unambiguous approach to the continuous phase without unwrapping. An algorithm is presented to chose a minimum number of different wavelengths to improve the accuracy of the phase measurement. The results are verified by an experimental setup and some practical examples.

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Chr. Wagner, Wolfgang Osten, and Soenke Seebacher "Direct shape measurement by digital wavefront reconstruction and multi-wavelength contouring," Optical Engineering 39(1), (1 January 2000). https://doi.org/10.1117/1.602338

Published: 1 January 2000

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