Study of the beam path distortion profiles generated by a two-axis tilt single-mirror laser scanner

Moustapha Hafez; Thomas C. Sidler; Rene-Paul Salathe

doi:10.1117/1.1557694

1 April 2003 Study of the beam path distortion profiles generated by a two-axis tilt single-mirror laser scanner

Moustapha Hafez, Thomas C. Sidler, Rene-Paul Salathe

Optical Engineering, Vol. 42, Issue 4, (April 2003). https://doi.org/10.1117/1.1557694

Beam distortion profiles are studied for scanning devices that have a single mirror with two rotational degrees of freedom (DOF), also named tip/tilt scanners. The case of a fast steering scanner used for high power material processing applications is studied. The scanner has a bandwidth of 700 Hz, a range of motion of ∓52 mrad (∓3 deg), and a resolution <5 μrad. The main dominant parameters that affect the distortion profile are identified. Furthermore, a vector analysis is derived to represent these distortions, and equations of the correction factors used to compensate for the systematic errors are proposed. A final accuracy better than 0.05% is obtained when these compensation factors are taken into account. The derivation proposed here can be extended to any scanning device with a single mirror with two-rotation DOF.

©(2003) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Moustapha Hafez, Thomas C. Sidler, and Rene-Paul Salathe "Study of the beam path distortion profiles generated by a two-axis tilt single-mirror laser scanner," Optical Engineering 42(4), (1 April 2003). https://doi.org/10.1117/1.1557694

Published: 1 April 2003

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available