Lateral and axial resolutions of an angle-deviation microscope for different numerical apertures: experimental results

Ming-Hung Chiu; Chin-Fa Lai; Chen-Tai Tan; Yi-Zhi Lin

doi:10.1117/1.3553007

1 March 2011 Lateral and axial resolutions of an angle-deviation microscope for different numerical apertures: experimental results

Ming-Hung Chiu, Chin-Fa Lai, Chen-Tai Tan, Yi-Zhi Lin

Author Affiliations +

Funded by: National Science Council of Taiwan

Optical Engineering, Vol. 50, Issue 3, 033204 (March 2011). https://doi.org/10.1117/1.3553007

Abstract

This paper presents a study of the lateral and axial resolutions of a transmission laser-scanning angle-deviation microscope (TADM) with different numerical aperture (NA) values. The TADM is based on geometric optics and surface plasmon resonance principles. The surface height is proportional to the phase difference between two marginal rays of the test beam, which is passed through the test medium. We used common-path heterodyne interferometry to measure the phase difference in real time, and used a personal computer to calculate and plot the surface profile. The experimental results showed that the best lateral and axial resolutions for NA = 0.41 were 0.5 μm and 3 nm, respectively, and the lateral resolution breaks through the diffraction limits.

©(2011) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Ming-Hung Chiu, Chin-Fa Lai, Chen-Tai Tan, and Yi-Zhi Lin "Lateral and axial resolutions of an angle-deviation microscope for different numerical apertures: experimental results," Optical Engineering 50(3), 033204 (1 March 2011). https://doi.org/10.1117/1.3553007

Published: 1 March 2011

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