Slab optical waveguides in Er3 +-doped tellurite glass by N+ ion implantation at 1.5 MeV

Simone Berneschi; Massimo Brenci; Gualtiero Nunzi Conti; Stefano Pelli; Marco Bettinelli; Adolfo Speghini; István Bányász; Andrea Watterich; Miklós Fried; Tivadar Lohner; Péter Petrik; Nguyen Q. Khanh; Zsolt Zolnai

doi:10.1117/1.3559209

1 July 2011 Slab optical waveguides in Er³⁺-doped tellurite glass by N⁺ ion implantation at 1.5 MeV

Simone Berneschi, Massimo Brenci, Gualtiero Nunzi Conti, Stefano Pelli, Marco Bettinelli, Adolfo Speghini, István Bányász, Andrea Watterich, Miklós Fried, Tivadar Lohner, Péter Petrik, Nguyen Q. Khanh, Zsolt Zolnai

Author Affiliations +

Optical Engineering, Vol. 50, Issue 7, 071110 (July 2011). https://doi.org/10.1117/1.3559209

Abstract

Slab optical waveguides were fabricated in tung-sten-tellurite glass doped with Er³⁺ ions by means of nitrogen ion implantation at 1.5 MeV. A wide range of ion doses (from 5·10¹² to 8·10¹⁶ ions/cm²) was used. Optical characterization, performed by dark-line spectroscopy, revealed that the waveguides were of optical barrier type: the implanted layer exhibited a decrease of the refractive index with respect to the virgin bulk glass, while the region comprised between the sample surface and the end of the ion track acted as an optical guiding structure. It was also demonstrated that a post-implantation annealing process, performed at various temperatures on the samples implanted at higher doses, contributes to the reduction of the barrier region.

©(2011) Society of Photo-Optical Instrumentation Engineers (SPIE)

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Simone Berneschi, Massimo Brenci, Gualtiero Nunzi Conti, Stefano Pelli, Marco Bettinelli, Adolfo Speghini, István Bányász, Andrea Watterich, Miklós Fried, Tivadar Lohner, Péter Petrik, Nguyen Q. Khanh, and Zsolt Zolnai "Slab optical waveguides in Er³⁺-doped tellurite glass by N⁺ ion implantation at 1.5 MeV," Optical Engineering 50(7), 071110 (1 July 2011). https://doi.org/10.1117/1.3559209

Published: 1 July 2011

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