Dual-phase-shift spherical Fizeau interferometer for reduction of noise due to internally scattered light

Toshiki Kumagai; Kenichi Hibino; Yasunari Nagaike

doi:10.1117/1.OE.56.3.034102

2 March 2017 Dual-phase-shift spherical Fizeau interferometer for reduction of noise due to internally scattered light

Toshiki Kumagai, Kenichi Hibino, Yasunari Nagaike

Author Affiliations +

Optical Engineering, Vol. 56, Issue 3, 034102 (March 2017). https://doi.org/10.1117/1.OE.56.3.034102

Abstract

Internally scattered light in a Fizeau interferometer is generated from dust, defects, imperfect coating of the optical components, and multiple reflections inside the collimator lens. It produces additional noise fringes in the observed interference image and degrades the repeatability of the phase measurement. A method to reduce the phase measurement error is proposed, in which the test surface is mechanically translated between each phase measurement in addition to an ordinary phase shift of the reference surface. It is shown that a linear combination of several measured phases at different test surface positions can reduce the phase errors caused by the scattered light. The combination can also compensate for the nonuniformity of the phase shift that occurs in spherical tests. A symmetric sampling of the phase measurements can cancel the additional primary spherical aberrations that occur when the test surface is out of the null position of the confocal configuration.

CC BY: © The Authors. Published by SPIE under a Creative Commons Attribution 4.0 Unported License. Distribution or reproduction of this work in whole or in part requires full attribution of the original publication, including its DOI.

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Toshiki Kumagai, Kenichi Hibino, and Yasunari Nagaike "Dual-phase-shift spherical Fizeau interferometer for reduction of noise due to internally scattered light," Optical Engineering 56(3), 034102 (2 March 2017). https://doi.org/10.1117/1.OE.56.3.034102

Received: 5 December 2016; Accepted: 10 February 2017; Published: 2 March 2017

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KEYWORDS

Phase measurement

Light scattering

Spherical lenses

Fizeau interferometers

Phase shifts

Reflection

Double positive medium

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