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1 March 2018 Overview of self-mixing interferometer applications to mechanical engineering
Silvano Donati, Michele Norgia
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Optical Engineering, Vol. 57, Issue 5, 051506 (March 2018). https://doi.org/10.1117/1.OE.57.5.051506
Abstract
We present an overview of the applications of self-mixing interferometer (SMI) to tasks of interest for mechanical engineering, namely high-resolution measurement of linear displacements, measurements of angles (tilt, yaw, and roll), measurements of subnanometer vibrations, and absolute distance, all on a remote target—representative of the tool-carrying turret of a tool-machine. Along with the advantages of SMI—compactness, low cost, minimum invasiveness, ease of use, and good accuracy, we illustrate the typical performance achieved by the basic SMI sensors, that is, the versions requiring a minimum of signal processing and discuss special features and problems of each approach.
© 2017 Society of Photo-Optical Instrumentation Engineers (SPIE)
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Silvano Donati and Michele Norgia "Overview of self-mixing interferometer applications to mechanical engineering," Optical Engineering 57(5), 051506 (1 March 2018). https://doi.org/10.1117/1.OE.57.5.051506
Received: 25 October 2017; Accepted: 1 February 2018; Published: 1 March 2018
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Cited by 36 scholarly publications and 1 patent.
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KEYWORDS
Interferometers
Mechanical engineering
Semiconductor lasers
Signal detection
Speckle
Error analysis
Distance measurement
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