This erratum corrects the units in parts (a) and (b) of Fig. 56. |
This article [Opt. Eng. 60(3), 035106 (15 March 2021) https://doi.org/10.1117/1.OE.60.3.035106] was originally published with an error in Fig. 56. The RMS error units in parts (a) and (b) were in “nm” instead of “μm.” The paper was corrected on 7 April 2021. |