13 January 2022 Near-infrared orthogonal polarized metalens
Feng Zhao, Bijie Xu, Decheng Wang, Hang Chen, Xiangning Chen
Author Affiliations +
Funded by: National Natural Science Foundation of China (NSFC)
Abstract

A metalens is a planar optical device that can accurately control the phase, polarization, and amplitude of light. Aiming at the application requirements of polarization imaging equipment for miniaturization, integration, and common field of view, we designed and fabricated two kinds of orthogonally polarized metalenses based on amorphous silicon and fused quartz. These metalenses can achieve orthogonal linear or circular polarization light imaging with a common field of view. The samples with a 2-mm diameter and 20-mm focal length were fabricated by electron beam exposure. The test results show that these metalenses can realize the imaging of orthogonal linearly or circularly polarized light simultaneously; the focusing efficiency is more than 50%, and the polarization contrast is >22  dB.

© 2022 Society of Photo-Optical Instrumentation Engineers (SPIE) 0091-3286/2022/$28.00 © 2022 SPIE
Feng Zhao, Bijie Xu, Decheng Wang, Hang Chen, and Xiangning Chen "Near-infrared orthogonal polarized metalens," Optical Engineering 61(1), 013102 (13 January 2022). https://doi.org/10.1117/1.OE.61.1.013102
Received: 16 August 2021; Accepted: 28 December 2021; Published: 13 January 2022
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CITATIONS
Cited by 2 scholarly publications.
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KEYWORDS
Polarization

Dielectric polarization

Transmittance

Lithographic illumination

Optical engineering

Image resolution

Silicon

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