6 March 2023 Optical dispersion and bandgap of ultralow expansion glass
Jue Wang, Michael J. Campion
Author Affiliations +
Abstract

The thermal-optical property of an ultralow expansion (ULE®) 7973 glass wafer was assessed using spectrophotometers and variable angle spectroscopic ellipsometers. By modeling both the spectral transmission and the ellipsometric data, we derived optical dispersion of the glass over a broad spectral region from 180 nm up to 12 μm. Our results indicate that the transparency region of the glass is terminated by two fundamental absorption edges in the ultraviolet (UV) and the infrared (IR). The UV and IR absorption edges are dominated by the titania and silica constituents, respectively. The exponential absorption tail, the Urbach energy, in the UV increases linearly with the temperature ranging from room temperature to 650°C, whereas the optical bandgap decreases linearly over the same temperature range. The temperature-dependent coefficient is 18 μeV / ° C for the Urbach energy and −0.7 meV / ° C for the optical bandgap.

© 2023 Society of Photo-Optical Instrumentation Engineers (SPIE)
Jue Wang and Michael J. Campion "Optical dispersion and bandgap of ultralow expansion glass," Optical Engineering 62(3), 037101 (6 March 2023). https://doi.org/10.1117/1.OE.62.3.037101
Received: 11 August 2022; Accepted: 14 February 2023; Published: 6 March 2023
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Glasses

Semiconducting wafers

Transmittance

Wafer-level optics

Dispersion

Ultraviolet radiation

Refractive index

RELATED CONTENT


Back to Top