We introduce an innovative optical phase shifter that utilizes a microelectromechanical system (MEMS) tuning mechanism, providing low power consumption, fast tuning, small dimensions, and high performance. In this approach, a rotating MEMS actuator is presented, enabling bi-directional actuation, which allows for both an increase and decrease in the effective mode index and phase shift. This provides lower operating voltage and shorter response time compared with other existing MEMS actuators. The proposed device exhibits impressive functional characteristics, including an overall dimension of |
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Phase shifts
Microelectromechanical systems
Waveguides
Refractive index
Photonic integrated circuits
Actuators
Silicon