Effects of H2O on atomic hydrogen generation in hydrogen plasma

Jun Kikuchi; Masafumi Suzuki; Hiroshi Yano; Shuzo Fujimura

doi:10.1117/12.142937

16 April 1993 Effects of H₂O on atomic hydrogen generation in hydrogen plasma

Jun Kikuchi, Masafumi Suzuki, Hiroshi Yano, Shuzo Fujimura

Proceedings Volume 1803, Advanced Techniques for Integrated Circuit Processing II; (1993) https://doi.org/10.1117/12.142937
Event: Microelectronic Processing '92, 1992, San Jose, CA, United States

Abstract

Water vapor added hydrogen gas is discharged by microwave. Concentrations of hydrogen atoms are measured in the plasma by actinometry and in the downstream by electron spin resonance (ESR). When water vapor is added to hydrogen gas, the concentration of hydrogen atoms in the plasma increases to an amount three times greater than that of pure hydrogen gas and the concentration in the downstream increases to an amount 90 times greater. When hydrogen gas without water vapor is discharged, the concentration of hydrogen atoms decreases just after the discharge is turned on. When water vapor is added to hydrogen gas, however, this time dependence of hydrogen concentration is not observed.

Citation Download Citation

Jun Kikuchi, Masafumi Suzuki, Hiroshi Yano, and Shuzo Fujimura "Effects of H₂O on atomic hydrogen generation in hydrogen plasma", Proc. SPIE 1803, Advanced Techniques for Integrated Circuit Processing II, (16 April 1993); https://doi.org/10.1117/12.142937

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available