SEMI standards programmed defect masks and their applications for defect inspection

Hiroichi Kawahira; Yoshiki Suzuki

doi:10.1117/12.212807

3 July 1995 SEMI standards programmed-defect masks and their applications for defect inspection

Hiroichi Kawahira, Yoshiki Suzuki

Proceedings Volume 2512, Photomask and X-Ray Mask Technology II; (1995) https://doi.org/10.1117/12.212807
Event: Photomask Japan 1995, 1995, Kanagawa, Japan

Abstract

A set of test masks on which programmed defects are placed has been standardized by SEMI (SEMI Standards P23-93). The masks have been designed to be used for benchmarking the sensitivity of defect inspection systems for reticles and masks. The standard test vehicles consist of two types of masks which have quasi device background patterns (contact holes or through-holes and wiring patterns) with a wide variety of programmed defects. The geometry of the background patterns on the masks have been designed for 0.5 micrometers or less when printed on a wafer with a 5x reduction stepper. Under the coordination of SEMI Japan, the test masks have experimentally been fabricated by a couple of Japanese mask shops, and the masks fabricated have been evaluated focusing on defect sizing accuracy. The mask which has holes as background pattern has been used for defect printability study using a 5x reduction i-line stepper. As a result, it has been confirmed that the test mask is a useful vehicle for the study. The standard masks, therefore, can also be used to make a standard defect spec on which mask suppliers and user agree.

Citation Download Citation

Hiroichi Kawahira and Yoshiki Suzuki "SEMI standards programmed-defect masks and their applications for defect inspection", Proc. SPIE 2512, Photomask and X-Ray Mask Technology II, (3 July 1995); https://doi.org/10.1117/12.212807

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