Absolute flatness testing of large synchrotron optics

Weihao Lin; Yumei He; Li Song; Hongxin Luo; Jie Wang

doi:10.1117/12.2068000

18 September 2014 Absolute flatness testing of large synchrotron optics

Weihao Lin, Yumei He, Li Song, Hongxin Luo, Jie Wang

Proceedings Volume 9282, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 92820R (2014) https://doi.org/10.1117/12.2068000
Event: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2014), 2014, Harbin, China

Abstract

Interferometry is one of the most efficient techniques in surface figure testing while the transmission surface usually limits the accuracy. Besides, standard figure interferometers often have a typical aperture of about 150 mm diameter which can not satisfy the need of large optics calibration. A novel method for characterizing the absolute surface figure of long grazing-incidence optics used in synchrotron radiation beamlines is presented. We demonstrate oblique incidence interferometry to overcome the aperture limitation. Furthermore, multiple rotating measurements are used to remove the transmission surface errors. The new solution is simple and easy without dismantling the transmission flat throughout the calibration procedure. The theoretical derivation, experiment results and uncertainty analysis are presented.

Citation Download Citation

Weihao Lin, Yumei He, Li Song, Hongxin Luo, and Jie Wang "Absolute flatness testing of large synchrotron optics", Proc. SPIE 9282, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 92820R (18 September 2014); https://doi.org/10.1117/12.2068000

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available