Parallel fabrication of wafer-scale plasmonic metamaterials for nano-optics

S. Eslami; J. G. Gibbs; A G. Mark; Tung Chun Lee; H.- H. Jeong; I. Kim; Peer Fischer

doi:10.1117/12.2080098

13 March 2015 Parallel fabrication of wafer-scale plasmonic metamaterials for nano-optics

S. Eslami, J. G. Gibbs, A G. Mark, Tung Chun Lee, H.- H. Jeong, I. Kim, Peer Fischer

Proceedings Volume 9374, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VIII; 93740R (2015) https://doi.org/10.1117/12.2080098
Event: SPIE OPTO, 2015, San Francisco, California, United States

Abstract

We describe how physical vapor deposition coupled with micelle-nanolithography-seeded substrates permits the growth of metamaterials with 3D structural and material control at the nanoscale. Novel plasmonic hybrid structures with tuned optical response from the UV to the near IR are demonstrated.

Citation Download Citation

S. Eslami, J. G. Gibbs, A G. Mark, Tung Chun Lee, H.- H. Jeong, I. Kim, and Peer Fischer "Parallel fabrication of wafer-scale plasmonic metamaterials for nano-optics", Proc. SPIE 9374, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VIII, 93740R (13 March 2015); https://doi.org/10.1117/12.2080098

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