Cross-sectional imaging of directed self-assembly block copolymers

Kye Okabe; He Yi; Maryann Tung; Richard Tiberio; Joost Bekaert; Roel Gronheid; H.-S. Philip Wong

doi:10.1117/12.2087569

19 March 2015 Cross-sectional imaging of directed self-assembly block copolymers

Kye Okabe, He Yi, Maryann Tung, Richard Tiberio, Joost Bekaert, Roel Gronheid, H.-S. Philip Wong

Proceedings Volume 9423, Alternative Lithographic Technologies VII; 942318 (2015) https://doi.org/10.1117/12.2087569
Event: SPIE Advanced Lithography, 2015, San Jose, California, United States

Abstract

In this paper we address an important topic for the development of block copolymer directed self assembly, which is the lack of the third dimensional information. The three-dimensional shape of the DSA feature directly impacts the ability to transfer the DSA pattern into etched patterns. Through TEM sample preparation by in-situ focused ion beam (FIB) Pt deposition and milling, we show cross-sectional images for the two most elemental building blocks of directed self assembled block copolymers, namely, the single and double-hole (peanut shape) etched in Si structures with great contrast at the interface formed by PS and PMMA. Additionally, a hard-mask single hole structure processed with a different template material is shown as well. Elemental mapping with energy filtered TEM (EFTEM) was shown to assist interpretation of images. 3D reconstruction of the holes formed in the hard-mask sample was performed using dark field (DF) STEM. A reduction in the SOC and SOG thickness was observed post in-situ Pt deposition for the hard mask structure. Further TEM sample preparation improvements will be needed to minimize the compression observed.

Citation Download Citation

Kye Okabe, He Yi, Maryann Tung, Richard Tiberio, Joost Bekaert, Roel Gronheid, and H.-S. Philip Wong "Cross-sectional imaging of directed self-assembly block copolymers", Proc. SPIE 9423, Alternative Lithographic Technologies VII, 942318 (19 March 2015); https://doi.org/10.1117/12.2087569

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available