An active reference spring array for in-situ calibration of the normal spring constant of AFM cantilevers

S. Gao; U. Brand; S. Hahn; K. Hiller

doi:10.1117/12.2178850

21 May 2015 An active reference spring array for in-situ calibration of the normal spring constant of AFM cantilevers

S. Gao, U. Brand, S. Hahn, K. Hiller

Proceedings Volume 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems; 951719 (2015) https://doi.org/10.1117/12.2178850
Event: SPIE Microtechnologies, 2015, Barcelona, Spain

Abstract

In this paper the concept of an "active reference spring array (ARSA)" for the AFM cantilever normal spring constant calibration is proposed. The ARSA with nominal stiffness varying from 0.4 N/m to 150 N/m will be available on these arrays with the aim to calibrate the normal stiffness of cantilevers ranging from 0.04 N/m to 1500 N/m. The fabrication process of the MEMS ARSA on basis of the Bonding Deep RIE technology developed at Chemnitz University of Technology is reported. A first characterization of the MEMS and the traceable determination of the stiffness of the MEMS suspending system have been realized. First experimental results compare very well with the Finite Element (FE) simulation of the numerical design, and prove the feasibility of the proposed concept.

Citation Download Citation

S. Gao, U. Brand, S. Hahn, and K. Hiller "An active reference spring array for in-situ calibration of the normal spring constant of AFM cantilevers", Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 951719 (21 May 2015); https://doi.org/10.1117/12.2178850

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