A developed method for surface testing based on the scattering interference effect

Zhongqi Tan; Yun Huang; Suyong Wu; Xiaobao Zhang; Yibo Zhang

doi:10.1117/12.2191034

24 September 2015 A developed method for surface testing based on the scattering interference effect

Zhongqi Tan, Yun Huang, Suyong Wu, Xiaobao Zhang, Yibo Zhang

Proceedings Volume 9628, Optical Systems Design 2015: Optical Fabrication, Testing, and Metrology V; 96280Q (2015) https://doi.org/10.1117/12.2191034
Event: SPIE Optical Systems Design, 2015, Jena, Germany

Abstract

Light scattering is an important and classical method for optical surface testing. Typical scheme of light scattering measurement often uses a single laser beam incidence, and then evaluates the surface quality via detecting and analyzing the scattering signal. In this work, a developed method for optical surface testing is proposed and demonstrated, and whose measuring principle is based on the scattering interference effect. In this approach, a single longitudinal mode laser beam is divided into two beams, when these beams irradiate the optical surface, their respective scattering fields would interfere with each other. If the phase between these incidence lights is scanned periodically, their scattering light interference signal would fluctuate simultaneously. Through analyzing this kind of scattering signal, our method can not only determine the scattering loss of optical surface, but also scale its inhomogeneity performance. A simply set of experimental apparatus is built up and used to demonstrated this method, which uses a single mode laser as the light source. Furthermore, to modulate the phase difference between two incidence beams, a piezoelectric ceramic is used. Some typical cases are then experimented and discussed, the results show that this method can be used to calibrate the quality of optical surface.

Citation Download Citation

Zhongqi Tan, Yun Huang, Suyong Wu, Xiaobao Zhang, and Yibo Zhang "A developed method for surface testing based on the scattering interference effect", Proc. SPIE 9628, Optical Systems Design 2015: Optical Fabrication, Testing, and Metrology V, 96280Q (24 September 2015); https://doi.org/10.1117/12.2191034

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available