Compact low-cost lensless digital holographic microscope for topographic measurements of microstructures in reflection geometry

A. Adinda-Ougba; B. Kabir; N. Koukourakis; F. Mitschker; N. C. Gerhardt; M. R. Hofmann

doi:10.1117/12.2191073

24 September 2015 Compact low-cost lensless digital holographic microscope for topographic measurements of microstructures in reflection geometry

A. Adinda-Ougba, B. Kabir, N. Koukourakis, F. Mitschker, N. C. Gerhardt, M. R. Hofmann

Author Affiliations +

Proceedings Volume 9628, Optical Systems Design 2015: Optical Fabrication, Testing, and Metrology V; 962818 (2015) https://doi.org/10.1117/12.2191073
Event: SPIE Optical Systems Design, 2015, Jena, Germany

Abstract

Digital holography is capable of providing surface profiles of samples with axial resolution in the nanometer range. Lensless digital holography is a well-established microscopic method providing diffraction limited resolution of the order of the wavelength of the used light source. It is based on inline holography and usually allows imaging only in transmission geometry.

In this contribution we propose a compact low cost lensless digital holographic microscope capable of performing measurements on reflective microstructures. The novelty of the system consists on a direct use of a laser diode without any need of coupling optics as light source. This simplifies the setup and provides sufficient magnification to measure microstructures. We evaluate our setup by imaging reflective microstructures. We have achieved ̴ 6 mm² field of view amplitude images with ̴ 2.5μm lateral resolution and phase images with axial resolution in nanometer range. The phase image provides a full-field profile measurement of the sample in nanometer range.

Citation Download Citation

A. Adinda-Ougba, B. Kabir, N. Koukourakis, F. Mitschker, N. C. Gerhardt, and M. R. Hofmann "Compact low-cost lensless digital holographic microscope for topographic measurements of microstructures in reflection geometry", Proc. SPIE 9628, Optical Systems Design 2015: Optical Fabrication, Testing, and Metrology V, 962818 (24 September 2015); https://doi.org/10.1117/12.2191073

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available