Study of thin film gas sensors using optical methods

Zhaosheng Tang; Zhengxiu Fan; Jian-Da Shao

doi:10.1117/12.408488

29 November 2000 Study of thin film gas sensors using optical methods

Zhaosheng Tang, Zhengxiu Fan, Jian-Da Shao

Proceedings Volume 4086, Fourth International Conference on Thin Film Physics and Applications; (2000) https://doi.org/10.1117/12.408488
Event: 4th International Conference on Thin Film Physics and Applications, 2000, Shanghai, China

Abstract

The optical sensitive characteristic of SnO₂ and V₂O₅ thin films to the gas SO₂ was investigated with photometric and ellipsometric methods. It is found that thin films of the Pd-doped SnO₂ and pure-V₂O₅ have good optical sensitive characteristics to SO₂ in the visible range, and the Zr-doped SnO₂ film in the near-infrared area. The results show that the change of the optical characteristic is directly related to the variation of optical gap and the concentration of free carrier in thin films.

Citation Download Citation

Zhaosheng Tang, Zhengxiu Fan, and Jian-Da Shao "Study of thin film gas sensors using optical methods", Proc. SPIE 4086, Fourth International Conference on Thin Film Physics and Applications, (29 November 2000); https://doi.org/10.1117/12.408488

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