Paper
1 October 1999 Lens temperature and performance correlation analysis
Jian-Yuan Chiou, M. F. Chen, C. L. Liu, Chih-Chien Hung
Author Affiliations +
Proceedings Volume 3892, Device and Process Technologies for MEMS and Microelectronics; (1999) https://doi.org/10.1117/12.364506
Event: Asia Pacific Symposium on Microelectronics and MEMS, 1999, Gold Coast, Australia
Abstract
Lens temperature is a dominant factor for lens performance in steppers. The lens temperature of steppers was controlled tightly with TCU system. This paper aims to discuss lens UDOF, NCE, Astigmatism, FPD, IPT, lens heating performance and CD repeatability. From experiment result, the optimized lens temperature is 22 degrees C of '74' lens. It resulted in maximum UDOF, minimum Astigmatism, minimum FPD, minimum NCE and minimum IPT. And under this temperature, there is minimum Intra-field CED STD and range on the conditions of lens cooling and heating. Non-optimized lens temperature will result in UDOF decrease and Aerial image distortion.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jian-Yuan Chiou, M. F. Chen, C. L. Liu, and Chih-Chien Hung "Lens temperature and performance correlation analysis", Proc. SPIE 3892, Device and Process Technologies for MEMS and Microelectronics, (1 October 1999); https://doi.org/10.1117/12.364506
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KEYWORDS
Reticles

Monochromatic aberrations

Semiconducting wafers

Critical dimension metrology

Distortion

Temperature metrology

Acquisition tracking and pointing

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