Production of magneto-optical data storage media by static DC sputter processes

Guenter Braeuer; Wilfried Dicken; Sabine Mueller

doi:10.1117/12.22382

1 December 1990 Production of magneto-optical data storage media by static DC sputter processes

Guenter Braeuer, Wilfried Dicken, Sabine Mueller

Proceedings Volume 1323, Optical Thin Films III: New Developments; (1990) https://doi.org/10.1117/12.22382
Event: 34th Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1990, San Diego, CA, United States

Abstract

Static sputter processes for the mass production of 5.25" magneto-optical data storage media have been developed. Such single disk processes require a discontinuous operation of circular magnetron cathodes in nonreactive and reactive gas atmospheres. Magnetron field configurations based on specially shaped rotating magnet patterns allow to meet high uniformity criteria for optical and magnetic properties of the individual layers using 210 mm targets and an integrated inner/outer diameter disk masking. The processes have been integrated into avery compact 'circular path coater' which realizes a throughput of 180 disks/hour. Experimental results of the process development for SiN and TbEeCo thin films are presented.

Citation Download Citation

Guenter Braeuer, Wilfried Dicken, and Sabine Mueller "Production of magneto-optical data storage media by static DC sputter processes", Proc. SPIE 1323, Optical Thin Films III: New Developments, (1 December 1990); https://doi.org/10.1117/12.22382

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available