500 watts industrial excimer laser at high repetition rate

Bernard Lacour; Henri Brunet; Herve Besaucele; Claude Gagnol; Bernard Vincent

doi:10.1117/12.184601

16 August 1994 500 watts industrial excimer laser at high repetition rate

Bernard Lacour, Henri Brunet, Herve Besaucele, Claude Gagnol, Bernard Vincent

Proceedings Volume 2206, High-Power Gas and Solid State Lasers; (1994) https://doi.org/10.1117/12.184601
Event: Europto High Power Lasers and Laser Applications V, 1994, Vienna, Austria

Abstract

We have developed high repetition rate, high average power excimer lasers intended for industrial applications. They operate in the phototriggered mode and have a compact design. The first prototype has been proven to operate continuously up to 700 Hz and delivers more than 500 W average power. A second prototype is intended to work at the same repetition rate. It delivers up to 2 J output energy at low repetition rate.

Citation Download Citation

Bernard Lacour, Henri Brunet, Herve Besaucele, Claude Gagnol, and Bernard Vincent "500 watts industrial excimer laser at high repetition rate", Proc. SPIE 2206, High-Power Gas and Solid State Lasers, (16 August 1994); https://doi.org/10.1117/12.184601

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