Mr. Aibin Yu Profile

Aibin Yu

at Shanghai Jiao Tong Univ

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Author

Publications (10)

Proceedings Article | 15 October 2001 Paper

Electrochemical microactuator based on hydrogen-absorbing film: the principle and first results

Guifu Ding, Yi Zhang, Chunsheng Yang, Xiaolin Zhao, Aibin Yu, Tianhui Shen

Proceedings Volume 4601, (2001) https://doi.org/10.1117/12.444707

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Proceedings Article | 15 October 2001 Paper

High-aspect-ratio PMMA microstructures fabricated by RIE

Aibin Yu, Guifu Ding, Chunsheng Yang, Changmin Li, Haiping Mao, Zhiping Ni

Proceedings Volume 4601, (2001) https://doi.org/10.1117/12.444692

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Proceedings Article | 15 October 2001 Paper

Hydrogen-induced actuation: a new active mechanism for MEMS

Yi Zhang, Guifu Ding, Chunsheng Yang, Aibin Yu, Bingchu Cai

Proceedings Volume 4601, (2001) https://doi.org/10.1117/12.444699

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Proceedings Article | 29 November 2000 Paper

Effect of easy axis orientation and bias field on MI effect in FeSiB amorphous film

Jinqiang Yu, Aibin Yu, Yong Zhou, Bingchu Cai, Xiaolin Zhao

Proceedings Volume 4086, (2000) https://doi.org/10.1117/12.408311

KEYWORDS: Magnetism, Anisotropy, Thin films, Sputter deposition, Microfabrication, Data storage, Berkelium, Magnetostrictive materials, Glasses, Argon

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Proceedings Article | 29 November 2000 Paper

PMMA deep etching by O2RIE

Aibin Yu, Guifu Ding, Xiaoyun Guo, Changmin Li, Haiping Mao, Zhiping Ni

Proceedings Volume 4086, (2000) https://doi.org/10.1117/12.408400

KEYWORDS: Etching, Polymethylmethacrylate, Reactive ion etching, Nickel, Oxygen, Ions, Photomasks, Wet etching, Thin films, Scanning electron microscopy

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Proceedings Article | 20 October 2000 Paper

Reactive ion etching of CVD diamond films for MEMS applications

Guifu Ding, Xiaolin Zhao, Aibin Yu, Chunsheng Yang, Bingchu Cai, Xiang Yao

Proceedings Volume 4230, (2000) https://doi.org/10.1117/12.404907

KEYWORDS: Diamond, Etching, Reactive ion etching, Microelectromechanical systems, Argon, Chemical vapor deposition, Optical lithography, Wet etching, Oxygen, Sputter deposition

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Proceedings Article | 25 August 2000 Paper

Patterning of diamond films by RIE and its MEMS applications

Guifu Ding, Jinyuan Yao, Aibin Yu, Xiaolin Zhao, Li Wang, Tianhui Shen

Proceedings Volume 4174, (2000) https://doi.org/10.1117/12.396465

KEYWORDS: Diamond patterning, Etching, Diamond, Reactive ion etching, Microelectromechanical systems, Photomasks, Chemical vapor deposition, Microelectronics, Electronics, Oxygen

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Proceedings Article | 25 August 2000 Paper

Dynamic actuation behavior of NiTi/Si diaphragm micropump

Dong Xu, Li Wang, Guifu Ding, Yong Zhou, Aibin Yu, Xiulan Cheng, Jian Chen, Bingchu Cai

Proceedings Volume 4174, (2000) https://doi.org/10.1117/12.396449

KEYWORDS: Actuators, Resistance

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Proceedings Article | 1 October 1999 Paper

Patterning of nickel-titanium SMA films with chemical etching by a novel multicomponent etchant

Guifu Ding, Aibin Yu, Xiaolin Zhao, Dong Xu, Bingchu Cai, Tianhui Shen

Proceedings Volume 3892, (1999) https://doi.org/10.1117/12.364501

KEYWORDS: Etching, Shape memory alloys, Optical lithography, Thin films, Photoresist materials, Scanning electron microscopy, Photomasks, Photography, Wet etching, Chemical elements

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Proceedings Article | 29 September 1999 Paper

Novel micropump actuated by thin film shape memory alloy

Dong Xu, Bingchu Cai, Guifu Ding, Yong Zhou, Aibin Yu, Li Wang, Xiaolin Zhao

Proceedings Volume 3891, (1999) https://doi.org/10.1117/12.364466

KEYWORDS: Silicon, Actuators, Thin films, Shape memory alloys, Etching, Composites, Sputter deposition, Optical lithography, Crystals, Gold

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Showing 5 of 10 publications

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