Mr. Akito Uemura Profile

Akito Uemura

at Osaka Institute of Technology

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Author

Publications (3)

Proceedings Article | 12 October 2021 Poster + Presentation

Degradation phenomena and photo luminescence for silica glass irradiated with 266 nm-laser

Atsushi Koizumi, Akito Uemura, Yuki Matsumoto, Tomosumi Kamimura, Nobu Kuzuu, Hideharu Horikoshi

Proceedings Volume 11910, 119101D (2021) https://doi.org/10.1117/12.2598664

KEYWORDS: Silica, Glasses, Luminescence, Laser irradiation, Ultraviolet radiation, Spectroscopy, Pulsed laser operation, Plasma, Laser induced damage

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Proceedings Article | 12 October 2021 Poster + Presentation

Analysis for damaged surface of Fused Silica with enhanced damage resistance after Magnetic Field-Assisted Finishing

Akito Uemura, Haruki Marui, Yuya Tsunezuka, Daichi Shima, Tomosumi Kamimura, Julian Long, Kristina Merino, Hitomi Yamaguchi

Proceedings Volume 11910, 119101P (2021) https://doi.org/10.1117/12.2598665

KEYWORDS: Surface finishing, Silica, Magnetism, Resistance, Polishing, Surface roughness, Contamination, Ultraviolet radiation, Optical components, Nd:YAG lasers

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Proceedings Article | 12 October 2021 Poster + Presentation

High-speed imaging of photoresist stripping phenomena induced by laser irradiation without causing the laser damage

Yuki Matsumoto, Naoki Nishioka, Atsushi Koizumi, Akito Uemura, Ryosuke Nakamura, Masashi Yoshimura, Hideo Horibe, Tomosumi Kamimura

Proceedings Volume 11910, 119101C (2021) https://doi.org/10.1117/12.2598555

KEYWORDS: Laser irradiation, Laser induced damage, Photoresist materials, High speed imaging, Pulsed laser operation, Silicon, Semiconducting wafers, Photoresist processing, Laser imaging, Semiconductors

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