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Dr. Alexey Yu. Illarionov
at ETH Zurich
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Publications (1)
Proceedings Article | 2 April 2014 Paper
New integrated Monte Carlo code for the simulation of high-resolution scanning electron microscopy images for metrology in microlithography
Emre Ilgüsatiroglu, Alexey Yu. Illarionov, Mauro Ciappa, Paul Pfäffli, Lars Bomholt
Proceedings Volume 9050, 90500I (2014) https://doi.org/10.1117/12.2048306
KEYWORDS: Monte Carlo methods, Line scan image sensors, 3D modeling, Scanning electron microscopy, Optical simulations, TCAD, Electron beams, Silica, Computer simulations, Line edge roughness
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