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Dr. Aliasghar Keyvani Janbahan
Scientist at TNO
SPIE Involvement:
Author
Publications (4)
Proceedings Article | 2 July 2019 Presentation + Paper
Improved sub-surface AFM using photothermal actuation
Maarten v. Reijzen , Mehmet Tamer, Maarten v. Es, Martijn v. Riel , Aliasghar Keyvani, Hamed Sadeghian, Marco v. d. Lans
Proceedings Volume 10959, 109590L (2019) https://doi.org/10.1117/12.2515441
KEYWORDS: Frequency modulation, Gold, Atomic force microscopy, Coating, Actuators, Modulation, Absorption, Overlay metrology, Amplitude modulation, Silicon
Proceedings Article | 26 March 2019 Paper
First results from the Large Dynamic Range Atomic Force Microscope for overlay metrology
Proceedings Volume 10959, 109592E (2019) https://doi.org/10.1117/12.2514044
KEYWORDS: Atomic force microscopy, Overlay metrology, Metrology, Interferometers, Actuators, Semiconducting wafers, Motion measurement, Feedback control
Proceedings Article | 8 March 2016 Paper
Simultaneous AFM nano-patterning and imaging for photomask repair
Aliasghar Keyvani, Mehmet S. Tamer, Maarten van Es, Hamed Sadeghian
Proceedings Volume 9778, 977818 (2016) https://doi.org/10.1117/12.2219041
KEYWORDS: Atomic force microscopy, Photomasks, Inspection, Optical lithography, Semiconductors, High volume manufacturing, Nanolithography, Time metrology, Glasses, Crystals, Argon, Fourier transforms, Diamond, Particles, Mathematical modeling, Silica
Proceedings Article | 10 April 2015 Paper
Transient tip-sample interactions in high-speed AFM imaging of 3D nano structures
Proceedings Volume 9424, 94242Q (2015) https://doi.org/10.1117/12.2185848
KEYWORDS: Atomic force microscopy, Motion models, Silicon, Stereoscopy, Nanoimaging, 3D image processing, Inspection, Semiconductors, Oscillators
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