Mr. Amir Reza Merati Profile

Amir Reza Merati

at Amirkabir Univ of Technology

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Author

Publications (2)

SPIE Journal Paper | 26 April 2013

Step flow model in continuous cellular automata method for simulation of anisotropic etching of silicon

Mohamad Amin Rezvankhah, Mohsen Shayan, Amir Reza Merati, Mohsen Pahlevani

JM3, Vol. 12, Issue 02, 023004, (April 2013) https://doi.org/10.1117/12.10.1117/1.JMM.12.2.023004

KEYWORDS: Chemical species, Etching, Silicon, Anisotropic etching, Photomasks, Simulation of CCA and DLA aggregates, Semiconducting wafers, Crystals, Tin, Device simulation

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SPIE Journal Paper | 1 April 2011

Study on atomistic model for simulation of anisotropic wet etching

Mohsen Shayan, Amir Reza Merati, Behrooz Arezoo, Mohamad Amin Rezvankhah

JM3, Vol. 10, Issue 02, 029701, (April 2011) https://doi.org/10.1117/12.10.1117/1.3586798

KEYWORDS: Chemical species, Etching, Anisotropic etching, Silicon, Wet etching, Crystals, Microelectromechanical systems, Monte Carlo methods, Computer simulations, Fabrication

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