We pursue the objective of developing a scatterometer based on focused-beam illumination and back-focal plane
imaging which is suitable for characterization of truly three-dimensional objects and provides locally-resolved
measurements unlike most of the state-of-the-art scatterometry tools. In this paper a full-scale simulation model for the
scatterometry is proposed, comprising vector description for the illumination and imaging in terms of physical optics,
and rigorous calculation of light-object interaction in the near field by a finite-difference-in-time-domain solver. Using
the model we optimize the scatterometry technique to get higher sensitivity to nano-scale dimensional variations of the
profile of test patterns. It has been demonstrated that asymmetry of the scattered field distribution allows one to
determine separately different parameters of test structures, including refractive index, height, width, side wall, and
orientation. Finally, we present a comparison of our approach with the through-focus scanning optical microscopy
method.
An innovative instrument for fast and accurate surface profiling of three dimensional patterned microstructures and insitu
plasma etching depth control is proposed. Several advantages of the design make it promising for in-situ metrology.
First, the system constitutes a common-path interferometer with the spatial phase shift between the reference and the
object beams, thus the vibration and improper positioning of an object have a minor impact on the system performance.
Second, no mechanical translation of either object or sensor is required; instead, a digital micromirror array is used for
scanning the surface. It results in a higher processing rate, better measuring reproducibility, and easy adaptation of the
method to specifics of the fabrication technology or object under test. Third, recording a full fringe for a particular pair
of object's pixels is done within a single frame of a CCD camera. Also, multiple fringes for the whole line of object
pixels can be captured at once. Then only 1-D scan is required to recover the depth profile of a 2-D object area. The
experimental setup has been constructed to verify major principles of the method and measurement of test samples have
been realized and compared to alternative measuring methods.
Optical properties of one-dimensional heterostructures having optical forbidden gap are described and photonic structures with n-i-p-i superlattices are designed for laser applications.
The time sweep by the optical streak camera of large number of plasma column sections is carried out. This allows to receive the 2-dimensional images with time of an exposition up to 0.5 ns, frequency of shooting up to 1 GHz and number of the frames up to 102. The technique is intended for study of dynamics of a plasma pinch behavior and allows to determine its configuration, characteristics sizes, dynamics of occurrence and localization of instabilities, speed of the expansion and compression, dynamics of temperature change. The ways of resolution increase are discussed.
It is shown that an interaction of ultrashort optical pulse with a deep modulated 1D periodic structure with cubic nonlinearity is followed either by an optical switching, compression or reshaping of a reflected pulse depending on its duration, intensity and detuning of a carrier frequency from an edge of a forbidden gap. It is found out that a gap structure with a metal cover on a back edge possesses a considerably smaller intensity threshold to attain a compression at pulse reflection.
A. Vasiliev, V. Gaidash, Gennadi Kirillov, T. Komissarova, L. Lapo, L. Lvov, Vasili Murugov, M. Ozerov, V. Punin, A. Ryadov, Andrei Smirnov, M. Sokolsky, A. Fedotov
A. Bessarab, V. Derkach, Sergey Garanin, Gennady Kochemasov, Nikolai Rukavishnikov, A. Ryadov, Andrei Smirnov, Stanislav Sukharev, N. Suslov, I. Voronich, A. Zaretskii
The requirements for the laser facility based on illumination uniformity calculations which allow the user to achieve implosion of 103 are formulated. The experimental results of the improved direct drive target illumination uniformity are presented. Using it for smoothing properties of the plasma phase plate (PPP) is proposed. PPP parameters for spatial and temporal smoothing of DDT illumination nonuniformities are evaluated.
Stanislav Kulikov, A. Dudov, Yu. Dolgopolov, E. Kosyak, Gennady Kochemasov, Gennadi Kirillov, Vasili Murugov, A. Ryadov, Andrei Smirnov, Stanislav Sukharev, A. Shkapa, L. Zykov
The paper presents experimental results of operating an iodine laser with an SBS mirror. We have investigated generation dynamics, optical phase conjugation quality, and optimal conditions for achieving the high brightness of output radiation.
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