CONFERENCE PROCEEDINGS
Advanced Search
Annemarie MacKenzie
at Infineon Technologies AG
SPIE Involvement:
Author
Publications (3)
Proceedings Article | 17 December 2003 Paper
Yield Mask: the latest developments and their application in a mask house production environment
Annemarie MacKenzie, Rudolf Laubmeier, Ankush Oberai, Sana Shaikh, Gerd Stockmann
Proceedings Volume 5256, (2003) https://doi.org/10.1117/12.517083
KEYWORDS: Inspection, Photomask technology, Databases, Scanning electron microscopy
Proceedings Article | 28 May 2003 Paper
Yield Mask: first professional yield management tool specifically developed for a mask house
Rudolf Laubmeier, Annemarie MacKenzie, Gerd Stockmann, Sana Shaik, Steve White
Proceedings Volume 5148, (2003) https://doi.org/10.1117/12.515142
KEYWORDS: Inspection, Photomasks, Databases, Semiconducting wafers, Manufacturing, Data processing, Defect inspection, Human-machine interfaces, Yield improvement, Data analysis
Proceedings Article | 16 August 2002 Paper
Defect density engineering for high-end masks (=0.14 technology phase-shift masks)
R Laubmeier, A MacKenzie, M Schmidt, R Sikorski, K Koremura, Takashi Ito
Proceedings Volume 4764, (2002) https://doi.org/10.1117/12.479344
KEYWORDS: Inspection, Etching, Scanning electron microscopy, Photomasks, Laser applications, Particles, Dry etching, Databases, Reticles, Chromium
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top