Dr. Annika Schmitt Profile

Dr. Annika Schmitt

at optiX fab GmbH

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 30 April 2023 Presentation

25 years of EUV multilayer optics development at optiX fab and Fraunhofer IOF

Torsten Feigl, Marco Perske, Hagen Pauer, Tobias Fiedler, Philipp Naujok, Klara Stallhofer, Tina Seifert, Annika Schmitt

Proceedings Volume PC12494, PC124940A (2023) https://doi.org/10.1117/12.2664589

KEYWORDS: Extreme ultraviolet, Multilayers, EUV optics, Semiconductors, Semiconducting wafers, Printing, Photons, Industry, Extreme ultraviolet lithography, Coating

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years