Mr. Anthony Woo Profile

Anthony Woo

SPIE Involvement:

Author

Publications (1)

This will count as one of your downloads.

You will have access to both the presentation and article (if available).

DOWNLOAD NOW

This content is available for download via your institution's subscription. To access this item, please sign in to your personal account.

Email or Username Forgot your username?

Password Forgot your password?

Show

Keep me signed in

No SPIE account? Create an account

Proceedings Article | 22 February 2021 Presentation + Paper

Scatterometry-based calibration of a 3D virtual fabrication model for gate-all-around devices

Ye Feng, Joseph Ervin, Yang Lu, Anthony Woo, Martyn Coogans, Ivan Chakarov, David Fried

Proceedings Volume 11614, 116140I (2021) https://doi.org/10.1117/12.2582789

KEYWORDS: Process modeling, Calibration, Gallium arsenide, Instrument modeling, 3D modeling, Fin field effect transistors, Transmission electron microscopy, Silicon, Scatterometry, Manufacturing

Read Abstract +

Process optimization is a required step during semiconductor technology pathfinding and device evaluation. Virtual process modeling and 3D fabrication tools can be used to study diagnostic, predictive, and prescriptive modeling of process windows and to accelerate process integration. These virtual techniques will become especially valuable as novel gate-all-around devices (GAA) are introduced to replace state-of-the-art FinFET technologies. Model calibration is needed to ensure the accuracy of any virtual fabrication model and requires wafer-based metrology data. Optical scatterometry has established its value in the FinFET era as an effective inline metrology technique due to its accuracy, throughput, and non-destructive nature. In this article, we demonstrate how spectra collected from scatterometry targets can be utilized to resolve sub-nanometer feature changes within a virtual fabrication platform. First, FEOL GAA simulations up to the SiGe epitaxial growth step were performed to establish spectral sensitivity to upstream process changes. A virtual fabrication model was subsequently calibrated using spectra with variations from earlier process steps as model parameters. These variations were accurately pinpointed for unknown spectra via least-square optimization. Additionally, machine learning methods were leveraged to provide instantaneous feedback during the inference phase. Sub-nanometer accuracy was achieved, enabling wide applications in semiconductor technology development. This newly demonstrated capability will be indispensable in GAA commercialization, where 3D metrology and process integration are ongoing challenges.

My Library

You currently do not have any folders to save your paper to! Create a new folder below.

Folder Name

Folder Description

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks. You are receiving this notice because your organization may not have SPIE eBooks access.*

*Shibboleth/Open Athens users─please sign in to access your institution's subscriptions.

To obtain this item, you may purchase the complete book in print or electronic format on SPIE.org.

ORGANIZATIONAL
Sign in with credentials provided by your organization.

Organizational Username

Organizational Password

Show/Hide Password

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members:

Non-members: ADD TO CART

Keywords/Phrases

Search In:

Publication Years