Mr. Atsushi Muto Profile

Atsushi Muto

at Hitachi High-Tech America Inc

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Publications (1)

Proceedings Article | 21 August 2020 Presentation + Paper

Ultra-low landing energy scanning electron microscopy for nanoengineering applications and metrology

Michael Postek, András Vladár, Dianne Poster, Atsushi Muto, Takeshi Sunaoshi

Proceedings Volume 11467, 114670Q (2020) https://doi.org/10.1117/12.2567051

KEYWORDS: Scanning electron microscopy, Electron beams, Sensors, Lens design, Nanoengineering, Spatial resolution, Silicon, Signal generators, Nanoparticles

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