Dr. Atsushi Sunahara Profile

Dr. Atsushi Sunahara

SPIE Involvement:

Author

Publications (24)

Proceedings Article | 13 November 2024 Poster

Poster

Plasma dynamics and future of LPP-EUV source for semiconductor manufacturing II

Hakaru Mizoguchi, Kentaro Tomita, Daisuke Nakamura, Yukihiro Yamagata, Takeshi Higashiguchi, Takashi Toshima, Hiroki Kondo, Takuji Sakamoto, Tanemasa Asano, Masaharu Shiratani, Atsushi Sunahara

Proceedings Volume PC13215, PC132150T (2024) https://doi.org/10.1117/12.3034536

KEYWORDS: Extreme ultraviolet, Plasma, Extreme ultraviolet lithography, Carbon dioxide lasers, Semiconductor manufacturing, Light sources, Tin, High volume manufacturing, Semiconductors, Lithography

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Proceedings Article | 10 April 2024 Presentation

Presentation

Plasma dynamics and future of LPP-EUV source for semiconductor manufacturing II

Hakaru Mizoguchi, Kentaro Toita Tomita, Masaharu Shiratani, Daisuke Nakamura, Yukihiro Yamagata, Takeshi Higashiguchi, Atsushi Sunahara

Proceedings Volume PC12953, PC129530Q (2024) https://doi.org/10.1117/12.3010018

KEYWORDS: Extreme ultraviolet, Plasma, Semiconductor manufacturing, Carbon dioxide lasers, Tin, Semiconductors, Scattering, Pulsed laser operation, Magnetism, Magnetic semiconductors

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Proceedings Article | 29 September 2023 Paper

Paper

Evaluation of suprathermal ions in a laser-produced plasma beyond-EUV source

Takeru Niinuma, Tsukasa Sugiura, Masaki Kume, Yuto Nakayama, Hiroki Morita, Atsushi Sunahara, Shinichi Namba, Takeshi Higashiguchi

Proceedings Volume 12915, 129150L (2023) https://doi.org/10.1117/12.2687366

KEYWORDS: Ions, Pulsed laser operation, Gadolinium, Plasma, Picosecond phenomena, Extreme ultraviolet, Light sources, Mirrors, Laser irradiation, Microchannel plates

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Proceedings Article | 13 November 2017 Paper

Paper

Kinetic model of optical damage in transparent crystals under continuous-wave laser irradiation

Susumu Kato, Atsushi Sunahara, Sunao Kurimura

Proceedings Volume 10447, 104471Z (2017) https://doi.org/10.1117/12.2279957

KEYWORDS: Absorption, Polarons, Crystals, Continuous wave operation, Color centers, Optical damage, Excitons

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Proceedings Article | 22 February 2017 Presentation + Paper

Presentation + Paper

Velocity measurement using frequency domain interferometer and chirped pulse laser

K. Ishii, Y. Nishimura, Y. Mori, R. Hanayama, Y. Kitagawa, T. Sekine, N. Sato, T. Kurita, T. Kawashima, A. Sunahara, Y. Sentoku, E. Miura, A. Iwamoto, H. Sakagami

Proceedings Volume 10089, 100890H (2017) https://doi.org/10.1117/12.2255704

KEYWORDS: Velocity measurements, Interferometers, Pulsed laser operation, Picosecond phenomena, Imaging spectroscopy, Doppler effect, Spectroscopy, Reflectors, Laser irradiation, Fringe analysis, Mirrors, Laser applications

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Proceedings Article | 18 March 2016 Paper

Paper

Modeling of initial interaction between the laser pulse and Sn droplet target and pre-plasma formation for the LPP EUV source

Akira Sasaki, Katsunobu Nishihara, Atushi Sunahara, Hiroyuki Furukawa, Takeshi Nishikawa

Proceedings Volume 9776, 97762C (2016) https://doi.org/10.1117/12.2219045

KEYWORDS: Tin, Extreme ultraviolet, Plasmas, Solids, Physics, Light sources, Liquids, Plasma, Particles, Detection and tracking algorithms, Laser irradiation, Laser ablation

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Proceedings Article | 9 July 2015 Paper

Paper

Experimental observation of laser-produced Sn extreme ultraviolet source diameter for high-brightness source

Goki Arai, Hiroyuki Hara, Thanh-Hung Dinh, Atsushi Sunahara, Takeshi Higashiguchi

Proceedings Volume 9658, 96581A (2015) https://doi.org/10.1117/12.2192188

KEYWORDS: Extreme ultraviolet, Laser energy, Plasma, Tin, Pulsed laser operation, Picosecond phenomena, Metrology, Photomasks, Inspection, Nd:YAG lasers

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Proceedings Article | 9 July 2015 Paper

Paper

Evaluation of a dot target based high-brightness microplasma extreme ultraviolet (EUV) source by hydrodynamic simulation

Hiroyuki Hara, Goki Arai, Thanh-Hung Dinh, Atsushi Sunahara, Takeshi Higashiguchi

Proceedings Volume 9658, 96581B (2015) https://doi.org/10.1117/12.2192194

KEYWORDS: Extreme ultraviolet, Plasma, Pulsed laser operation, Tin, Ions, Picosecond phenomena, Tellurium, Opacity, Optical simulations, Numerical simulations

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Proceedings Article | 22 March 2010 Paper

Paper

Modeling of atomic and plasmas processes in the LPP and LA-DPP EUV source

Akira Sasaki, Katsunobu Nishihara, Atsushi Sunahara, Hiroyuki Furukawa, Takeshi Nishikawa, Fumihiro Koike

Proceedings Volume 7636, 76363D (2010) https://doi.org/10.1117/12.846467

KEYWORDS: Plasmas, Tin, Extreme ultraviolet, Ions, Satellites, Ionization, Electrodes, Data modeling, Radiative transfer, Temperature metrology

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Proceedings Article | 18 March 2009 Paper

Paper

Atomic processes in the LPP and LA-DPP EUV sources

Akira Sasaki, Katsunobu Nishihara, Atsushi Sunahara, Hiroyuki Furukawa, Takeshi Nishikawa, Fumihiro Koike

Proceedings Volume 7271, 727130 (2009) https://doi.org/10.1117/12.814026

KEYWORDS: Plasmas, Extreme ultraviolet, Ions, Tin, Satellites, Opacity, Radiative transfer, Data modeling, Information operations, Optical pumping

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Proceedings Article | 20 March 2008 Paper

Paper

Advanced laser-produced EUV light source for HVM with conversion efficiency of 5-7% and B-field mitigation of ions

K. Nishihara, A. Sunahara, A. Sasaki, S. Fujioka, Y. Shimada, M. Nunami, H. Tanuma, M. Murakami, T. Aota, K. Fujima, H. Furukawa, T. Nishikawa, F. Koike, R. More, T. Kato, V. Zhakhovskii, K. Gamata, H. Ueda, H. Nishimura, Y. Yuba, K. Nagai, N. Miyanaga, Y. Izawa, K. Mima

Proceedings Volume 6921, 69210Y (2008) https://doi.org/10.1117/12.769086

KEYWORDS: Ions, Tin, Pulsed laser operation, Plasma, Extreme ultraviolet, Carbon dioxide lasers, Sputter deposition, Magnetism, Light sources, Etching

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Proceedings Article | 24 March 2006 Paper

Paper

Energy spectra and charge state of debris emitted from laser-produced minimum mass tin plasmas

Shinsuke Fujioka, Hiroaki Nishimura, Tsuyoshi Ando, Nobuyoshi Ueda, Shinichi Namba, Tatsuya Aota, Masakatsu Murakami, Katsunobu Nishihara, Young-G. Kang, Atsushi Sunahara, Hiroyuki Furukawa, Yoshinori Shimada, Kazuhisa Hashimoto, Michiteru Yamaura, Yuzuri Yasuda, Keiji Nagai, Takayoshi Norimatsu, Noriaki Miyanaga, Yasukazu Izawa, Kunioki Mima

Proceedings Volume 6151, 61513V (2006) https://doi.org/10.1117/12.656071

KEYWORDS: Plasmas, Tin, Ions, Extreme ultraviolet, Pulsed laser operation, Mirrors, Chemical species, Light sources, Opacity, Extreme ultraviolet lithography

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Proceedings Article | 24 March 2006 Paper

Paper

Analysis of the emission spectrum of Xe and Sn

A. Sasaki, K. Nishihara, A. Sunahara, T. Nishikawa, F. Koike, K. Kagawa, H. Tanuma

Proceedings Volume 6151, 61513W (2006) https://doi.org/10.1117/12.655938

KEYWORDS: Plasmas, Tin, Xenon, Satellites, Ions, Extreme ultraviolet, Opacity, Spectroscopy, Ionization, Gas lasers

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Proceedings Article | 23 March 2006 Paper

Paper

Progress in LPP EUV source development at Osaka University

Noriaki Miyanaga, Hiroaki Nishimura, Shinsuke Fujioka, Tatsuya Aota, Shigeaki Uchida, Michiteru Yamaura, Yoshinori Shimada, Kazuhisa Hashimoto, Keiji Nagai, Takayoshi Norimatsu, Katsunobu Nishihara, Masakatsu Murakami, Vasilli Zhakhovskii, Young Kang, Atsushi Sunahara, Hiroyuki Furukawa, Akira Sasaki, Takeshi Nishikawa, Massahiro Nakatsuka, Hisanori Fujita, Koji Tsubakimoto, Hidetsugu Yoshida, Yasukazu Izawa, Kunioki Mima

Proceedings Volume 6151, 61511Q (2006) https://doi.org/10.1117/12.656555

KEYWORDS: Extreme ultraviolet, Tin, Plasma, Pulsed laser operation, Ions, Nd:YAG lasers, Laser development, YAG lasers, Absorption, Opacity

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Proceedings Article | 6 May 2005 Paper

Paper

Modeling of the atomic processes in the laser-plasma EUV sources

A. Sasaki, K. Nishihara, F. Koike, K. Kagawa, H. Tanuma, A. Sunahara, K. Gamada, T. Nishikawa

Proceedings Volume 5751, (2005) https://doi.org/10.1117/12.602029

KEYWORDS: Xenon, Plasmas, Tin, Satellites, Opacity, Extreme ultraviolet, Ions, Data modeling, Laser processing, Laser applications

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Proceedings Article | 6 May 2005 Paper

Paper

Properties of EUV and particle generations from laser-irradiated solid- and low-density tin targets

Shinsuke Fujioka, Hiroaki Nishimura, Tomoharu Okuno, Yezheng Tao, Nobuyoshi Ueda, Tsuyoshi Ando, Hiroto Kurayama, Yuzuri Yasuda, Shigeaki Uchida, Yoshinori Shimada, Michiteru Yamaura, Qincui Gu, Keiji Nagai, Takayoshi Norimatsu, Hiroyuki Furukawa, Atsushi Sunahara, Young-G. Kang, Masakatsu Murakami, Katsunobu Nishihara, Noriaki Miyanaga, Yasukazu Izawa

Proceedings Volume 5751, (2005) https://doi.org/10.1117/12.598692

KEYWORDS: Tin, Extreme ultraviolet, Plasmas, Ions, Opacity, Mirrors, EUV optics, Pulsed laser operation, Laser ablation, Particles

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Proceedings Article | 20 September 2004 Paper

Paper

Experimental study on ablative stabilization of Rayleigh-Taylor instability of laser-irradiated targets

Keisuke Shigemori, Tatsuhiko Sakaiya, Kazuto Otani, Shinsuke Fujioka, Mitsuo Nakai, Hiroshi Azechi, Hiroyuki Shiraga, Yohei Tamari, Kazuki Okuno, Atsushi Sunahara, Hideo Nagatomo, Masakatsu Murakami, Katsunobu Nishihara, Yasukazu Izawa

Proceedings Volume 5448, (2004) https://doi.org/10.1117/12.548818

KEYWORDS: Laser ablation, X-rays, Laser irradiation, Electron transport, Convection, Physics, Optical simulations, Streak cameras, Laser engineering, Bromine

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Proceedings Article | 20 September 2004 Paper

Paper

Dependence of EUV emission properties on laser wavelength

Michiteru Yamaura, Shigeaki Uchida, Atsushi Sunahara, Yoshinori Shimada, Kazuhisa Hashimoto, Chiyoe Yamanaka, Keisuke Shigemori, Shinsuke Fujioka, Tomoharu Okuno, Keiji Nagai, Takayoshi Norimatsu, Hiroaki Nishimura, Katsunobu Nishihara, Noriaki Miyanaga, Yasukazu Izawa

Proceedings Volume 5448, (2004) https://doi.org/10.1117/12.557207

KEYWORDS: Extreme ultraviolet, Plasma, Tin, Laser applications, Optical simulations, Opacity, Lithography, Excimer lasers, Laser energy, Absorption

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Proceedings Article | 20 September 2004 Paper

Paper

Simulations on laser ablation and its applications

Hiroyuki Furukawa, Tohru Kawamura, Atsushi Sunahara, Takeshi Nishikawa, Katsunobu Nishihara, Chiyoe Yamanaka

Proceedings Volume 5448, (2004) https://doi.org/10.1117/12.549105

KEYWORDS: Laser ablation, Electrons, Absorption, Optical simulations, Liquids, Plasma, Ions, Extreme ultraviolet, Chemical species, Particles

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Proceedings Article | 20 May 2004 Paper

Paper

Theoretical simulation of extreme UV radiation source for lithography

Kazumi Fujima, Katsunobu Nishihara, Toru Kawamura, Hiroyuki Furukawa, Takashi Kagawa, Fumihiro Koike, Richard More, Masakatsu Murakami, Takeshi Nishikawa, Akira Sasaki, Atsushi Sunahara, Vasillii Zhakhovskii, Takashi Fujimoto, Hajime Tanuma

Proceedings Volume 5374, (2004) https://doi.org/10.1117/12.534989

KEYWORDS: Ions, Extreme ultraviolet, Plasmas, Electrons, Tin, Lithography, Solids, Ultraviolet radiation, Opacity, Xenon

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Proceedings Article | 20 May 2004 Paper

Paper

Properties of EUV emissions from laserproduced tin plasmas

Yoshinori Shimada, Hiroaki Nishimura, Kazuhisa Hashimoto, Michiteru Yamaura, Keisuke Shigemori, Mitsuo Nakai, Shinsuke Fujioka, Shigeaki Uchida, Tomoharu Okuno, Takahiro Hibino, Nobuyoshi Ueda, Ryoji Matsui, Yezheng Tao, Keiji Nagai, Takayoshi Norimatsu, Toru Kawamura, Atsushi Sunahara, Katsunobu Nishihara, Noriaki Miyanaga, Masahiro Nakatsuka, Yasukazu Izawa, Chihiro Yamanaka

Proceedings Volume 5374, (2004) https://doi.org/10.1117/12.534959

KEYWORDS: Extreme ultraviolet, Tin, Plasmas, Spectroscopy, Spherical lenses, Laser applications, Lithography, Grazing incidence, Laser energy, Calibration

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Proceedings Article | 20 May 2004 Paper

Paper

Experimental study on basic properties of laser-produced EUV plasmas on GEKKO-XII laser facility

Keisuke Shigemori, Mitsuo Nakai, Yoshinori Shimada, Michiteru Yamaura, Kazuhisa Hashimoto, Shinsuke Fujioka, Hiroaki Nishimura, Shigeaki Uchida, Atsushi Sunahara, Katsunobu Nishihara, Noriaki Miyanaga, Yasukazu Izawa

Proceedings Volume 5374, (2004) https://doi.org/10.1117/12.533918

KEYWORDS: Extreme ultraviolet, Plasmas, Opacity, Tin, X-rays, Laser ablation, Aluminum, Pulsed laser operation, Optical filters, Laser irradiation

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Proceedings Article | 20 May 2004 Paper

Paper

Estimation of emission efficiency for laser-produced EUV plasmas

Toru Kawamura, Atsushi Sunahara, Kouhei Gamada, Kazumi Fujima, Fumihiro Koike, Hiroyuki Furukawa, Takeshi Nishikawa, Akira Sasaki, Takashi Kagawa, Richard More, Takako Kato, Masakatsu Murakami, Vasillii Zhakhovskii, Hajime Tanuma, Takashi Fujimoto, Yoshinori Shimada, Michiteru Yamaura, Kazuhisa Hashimoto, Shigeaki Uchida, Chiyoe Yamanaka, Tomoharu Okuno, Takahiro Hibino, Nobuyoshi Ueda, Ryoji Matsui, Yezheng Tao, Mitsuo Nakai, Keisuke Shigemori, Shinsuke Fujioka, Keiji Nagai, Takayoshi Norimatsu, Hiroaki Nishimura, Katsunobu Nishihara, Noriaki Miyanaga, Yasukazu Izawa

Proceedings Volume 5374, (2004) https://doi.org/10.1117/12.535031

KEYWORDS: Extreme ultraviolet, X-rays, Plasmas, Tin, Electrons, Ions, Opacity, Laser development, Solids, Pulsed laser operation

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Proceedings Article | 23 April 2001 Paper

Paper

Model experiments of fast ignition with coaxial high-power laser beams

Katsumasa Fujita, A. Sunahara, Kazuo Tanaka, Nobuhiko Izumi, Takahisa Jitsuno, Noriaki Miyanaga, Takeshi Miyakoshi, H. Otani, Mitsuhiro Fukao, Manabu Heya, Yoshihiro Ochi, Yoneyoshi Kitagawa, Ryosuke Kodama, Kunioki Mima, Hiroaki Nishimura, Takayoshi Norimatsu, Yasuhiko Sentoku, Hideaki Takabe, Tatsuhiko Yamanaka

Proceedings Volume 4424, (2001) https://doi.org/10.1117/12.425618

KEYWORDS: Plasma, X-rays, Fusion energy, Laser drilling, Pulsed laser operation, Picosecond phenomena, X-ray imaging, High power lasers, Solids, Spectrometers

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Showing 5 of 24 publications

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