Dr. Axel Wiegmann Profile

Dr. Axel Wiegmann

at Mahr GmbH

SPIE Involvement:

Author

Publications (13)

Proceedings Article | 18 August 2018 Paper

Minimizing the Abbe-offset in interferometric radius metrology

Axel Wiegmann, Markus Lotz, Torsten Mai, Ulrike Fuchs

Proceedings Volume 10749, 107490W (2018) https://doi.org/10.1117/12.2321102

KEYWORDS: Optical spheres, Spherical lenses, Lenses, Optical alignment, Calibration, Reflectors, Interferometers, Interferometry, Metrology, Uncertainty analysis

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SPIE Journal Paper | 16 March 2016

Metrological multispherical freeform artifact

Gernot Blobel, Axel Wiegmann, Jens Siepmann, Michael Schulz

OE, Vol. 55, Issue 07, 071202, (March 2016) https://doi.org/10.1117/12.10.1117/1.OE.55.7.071202

KEYWORDS: Spherical lenses, Freeform optics, Calibration, Metrology, Optical spheres, Copper, Optics manufacturing, Interferometry, Wavefronts, Interferometers

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Proceedings Article | 24 September 2015 Paper

Current developments on optical asphere and freeform metrology

S. Mühlig, J. Siepmann, M. Lotz, A. Wiegmann, G. Blobel, S. Mika, A. Beutler, U. Nehse

Proceedings Volume 9628, 962812 (2015) https://doi.org/10.1117/12.2191247

KEYWORDS: Aspheric lenses, Interferometers, Aspheric optics, Light sources, Optical spheres, Interferometry, Freeform optics, Metrology, Optical testing, Distance measurement

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Proceedings Article | 13 May 2013 Paper

Sensitivity analysis of tilted-wave interferometer asphere measurements using virtual experiments

Ines Fortmeier, Manuel Stavridis, Axel Wiegmann, Michael Schulz, Goran Baer, Christof Pruss, Wolfgang Osten, Clemens Elster

Proceedings Volume 8789, 878907 (2013) https://doi.org/10.1117/12.2019986

KEYWORDS: Aspheric lenses, Interferometers, Wavefronts, Ray tracing, Calibration, Environmental sensing, Inverse optics, Sensors, Zernike polynomials, Virtual reality

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Proceedings Article | 26 November 2012 Paper

Experimental techniques for aberration retrieval with through-focus intensity images

S. Pereira, A. Wiegmann, N. Kumar, A. da Costa Assafrao, A. Polo, L. Wei, S. van Haver

Proceedings Volume 8557, 855706 (2012) https://doi.org/10.1117/12.2000376

KEYWORDS: CCD cameras, Diffraction, Imaging systems, Objectives, Calibration, Digital video discs, Direct methods, Interferometry, Lenses, Collimation

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Proceedings Article | 27 May 2011 Paper

Some aspects of error influences in interferometric measurements of optical surface forms

M. Schulz, A. Wiegmann

Proceedings Volume 8082, 80821C (2011) https://doi.org/10.1117/12.895002

KEYWORDS: Interferometry, Interferometers, Sensors, Optical testing, Metrology, Aspheric lenses, Error analysis, Fringe analysis, Standards development, Imaging systems

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Proceedings Article | 14 May 2010 Paper

Simple methods for alignment of line distance sensor arrays

H. Bremer, F. Schmähling, C. Elster, S. Krey, A. Ruprecht, M. Schulz, M. Stavridis, A. Wiegmann

Proceedings Volume 7718, 77181M (2010) https://doi.org/10.1117/12.854266

KEYWORDS: Sensors, CCD image sensors, Distance measurement, CCD cameras, Optical arrays, Colorimetry, Microscopes, Charge-coupled devices, Optical sensors, Distortion

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Proceedings Article | 17 June 2009 Paper

A model based approach to reference-free straightness measurement at the Nanometer Comparator

C. Weichert, M. Stavridis, M. Walzel, C. Elster, A. Wiegmann, M. Schulz, R. Köning, J. Flügge, R. Tutsch

Proceedings Volume 7390, 73900O (2009) https://doi.org/10.1117/12.827681

KEYWORDS: Sensors, Error analysis, Interferometers, Mirrors, Microscopes, Computer programming, Calibration, Environmental sensing, Virtual reality, Head

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Proceedings Article | 12 January 2009 Paper

Interferometry at the PTB Nanometer Comparator: design, status and development

J. Flügge, Ch. Weichert, H. Hu, R. Köning, H. Bosse, A. Wiegmann, M. Schulz, C. Elster, R. Geckeler

Proceedings Volume 7133, 713346 (2009) https://doi.org/10.1117/12.821252

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Proceedings Article | 17 October 2008 Paper

Development of a 1.5D reference comparator for position and straightness metrology on photomasks

J. Flügge, R. Köning, Ch. Weichert, W. Häßler-Grohne, R. Geckeler, A. Wiegmann, M. Schulz, C. Elster, H. Bosse

Proceedings Volume 7122, 71222Y (2008) https://doi.org/10.1117/12.801251

KEYWORDS: Interferometers, Photomasks, Metrology, Mirrors, Computer programming, Calibration, Sensors, Microscopes, Beam splitters, Image registration

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Proceedings Article | 18 June 2007 Paper

Stability analysis for the TMS method: Influence of high spatial frequencies

Axel Wiegmann, Clemens Elster, Ralf Geckeler, Michael Schulz

Proceedings Volume 6616, 661618 (2007) https://doi.org/10.1117/12.726116

KEYWORDS: Sensors, Interferometers, Distortion, Spatial frequencies, Computer simulations, Optical scanning systems, Interferometry, Distance measurement, Autocollimators, Wavefronts

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The Traceable Multi Sensor (TMS) system is a scanning system for the measurement of the topography of large optical surfaces. The system uses a compact interferometer with an aperture of some millimetres to realize multiple distance sensors and an autocollimator for the angle measurement. In contrast to common stitching techniques, the systematic sensor errors are calculated in addition to the entire topography by the TMS algorithm. Additionally, piston and tilt at each position of the interferometer are determined by the algorithm. An essential requirement for the algorithm is the exact lateral positioning of the sensor at given locations. The goal of this paper is to investigate the influence of a class of error sources on the resulting topography estimation using computer simulations. The errors of this class result in inexact measurement positions of the distance sensors. Especially the lateral positioning errors of the scanning stage lead to increasing errors for short wavelengths. For topography wavelengths below 3mm with an amplitude of 100nm the resulting topography error increases to 3nm and more. For longer wavelengths the positioning errors are no longer the dominant error source and the root mean square error of the resulting topography is approximately 1 nm for positioning errors with a standard deviation of 5 &mgr;m. The pixel distance error and distortion of the interferometer strongly influence the topography measurement of specimens with large deviations from a plane. The simulations show that for a topography with a peak to valley of 50 &mgr;m the root mean square error of the reconstructed topography is below 10 nm. Furthermore, a possibility to compensate the lateral positioning error of the scanning stage is presented which makes the TMS method nearly independent of positioning errors of the scanning stage. As a consequence, it is possible to use systems of non equidistant distance sensors whose lateral distances are independent of the positioning interval.