Ms. Ayako Nakajima Profile

Ayako Nakajima

at The Institute of Scientific and Industrial Research

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Author

Publications (4)

Proceedings Article | 26 September 2019 Paper

Strategy for the breakthrough of RLS trade-off relationship in the development of novel resist materials and a developer

Ayako Nakajima, Manabu Hoshino, Kazunori Taguchi, Takahiro Kozawa

Proceedings Volume 11148, 1114814 (2019) https://doi.org/10.1117/12.2536526

KEYWORDS: Fluorine, Chemical species, Scanning electron microscopy, Lithography, Optical lithography, Absorption, Carbon

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Proceedings Article | 28 June 2019 Paper

Analysis of line-and-space patterns of ZrO2 nanoparticle resist on the basis of EUV sensitization mechanism

Takahiro Kozawa, Teppei Yamada, Ayako Nakajima, Yusa Muroya, Julius Joseph Santillan, Toshiro Itani

Proceedings Volume 10957, 109570C (2019) https://doi.org/10.1117/12.2515133

KEYWORDS: Nanoparticles, Line width roughness, Metals, Oxides, X-rays, Reflectivity, Extreme ultraviolet, Zirconium dioxide, Extreme ultraviolet lithography

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Proceedings Article | 31 May 2019 Paper

Fundamental study on dissolution kinetics of poly(4-hydroxystyrene) for development of high-resolution resists

Ayako Nakajima, Kyoko Watanabe, Kyoko Matsuoka, Takahiro Kozawa, Yoshitaka Komuro, Daisuke Kawana, Akiyoshi Yamazaki

Proceedings Volume 10957, 109571R (2019) https://doi.org/10.1117/12.2514938

KEYWORDS: Polymers, Molecules, Quartz, Crystals, Polymer thin films, Extreme ultraviolet lithography, Diffusion, Complex systems, Chemically amplified resists, Lithography

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Proceedings Article | 3 October 2018 Presentation + Paper

Material design for the improvement of ZEP520A performance

A. Nakajima, T. Kozawa, M. Hoshino, M. Hashimoto

Proceedings Volume 10810, 108100O (2018) https://doi.org/10.1117/12.2501648

KEYWORDS: Polymers, Electron beam lithography, Molecules, Scanning electron microscopy, Silicon, Semiconducting wafers, Lithography, Nanolithography, Nanoimprint lithography, Polymethylmethacrylate

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