Automated extraction of the +1 term spectrum can greatly benefit the real-time measurement of dynamic deformation in the digital speckle pattern interferometry (DSPI). However, most spatial filtering methods are not satisfactory for automatic analysis because they need manual intervention or are unable to accurately extract multiple +1 term spectrums in one frequency distribution image. We propose an adaptive local threshold segmentation method for the Fourier spatial filtering of a three-dimensional DSPI system. This method first uses global thresholding to coarsely recognize the spectral regions and then adopts local thresholding to accurately determine the spatial filtering windows for each spectrum. Experimental result shows that the proposed adaptive local threshold segmentation can accurately extract multiple desired +1 term spectrums even if the intensities of different spectral regions differ greatly. In addition, experiments of the comparison between the automatic and manual spatial filtering and automatic analysis of dynamic deformation demonstrate that the proposed method can be used for the real-time measurement.
In the laser synthetic wavelength interferometer (LSWI), enhancing the stability of the synthetic wavelength is very important for the improvement of displacement measurement accuracy. A synthetic wavelength stabilization scheme using offset-frequency locking for LSWI is proposed. By locking an external cavity diode laser to the +3rd sideband of an I2 frequency-stabilized He–Ne laser modulated with an electro-optic modulator, a stabilized large synthetic wavelength with frequency difference of 815 MHz can be obtained for LSWI. The optical configuration and principle of offset-frequency locking is described in detail. The experiments of frequency stability and displacement measurement were carried out to demonstrate the feasibility and effectiveness of the proposed scheme. Frequency stability experimental results show that the relative stability of the frequency difference between the two lasers is about 1.84 × 10 − 11 at 1 s averaging time. Nanometer and micrometer displacement measurement results show that subnanometer accuracy can be realized. These results indicate that the proposed scheme is able to evidently improve the displacement measurement accuracy of LSWI.
From the actual implementation of displacement measurement in the laser synthetic wavelength interferometer, a nonlinear error analysis model was proposed by detecting the simultaneous zero-crossing position errors of two interference signals. By using this model, periodic nonlinear errors resulting from the polarizing leakage induced by the imperfection or misalignment of the polarizing beamsplitter in the basic configuration of the interferometer were analyzed. In order to reduce periodic nonlinear errors, two optimized optical configurations of the interferometer were presented. The simulations and experiments for verifying the performance of three configurations of the interferometer were performed. The experimental results demonstrate that the optimized third configuration has good stability, with a standard deviation of about 0.7 nm.
KEYWORDS: Control systems, Control systems design, Signal generators, Data acquisition, Interferometers, LabVIEW, Ceramics, Metrology, Interfaces, Human-machine interfaces
A control and measuring system of two-dimensional nanopositioning stage is designed for the multiple selection and combinations control based on LabVIEW. The signal generator of the system can not only generate the commonly used control signals such as sine, square, triangle and sawtooth waves, but also generate special signals such as trapezoidal wave and step wave with DAQ data acquisition card. The step wave can be triggered by the other signals for the strict timing corresponding relation between X-Y control signals. Finally, the performance of the control system of two-dimensional nanopositioning stage is conducted by the heterodyne interferometer. The results show that the operation of the system is stable and reliable and the noise peak - valley value is superior to 2nm while the stage moving with 6nm step. The system can apply to the field requiring the precise control to the positioning stage in nano-measurement and metrology.
Nanoscale micromotion stage is a key instrument for the reasarch of nanotechnology that provides one-dimensional, two-dimensional, or three-dimensional nanoscale movement. In this paper, a magnetic levitation stage that can provide large range micromotion with nanometer positioning accuracy is proposed, and a height measurement and calibration of the stage using a triplex heterodyne interferometer is presented. This measurement system is mainly consists of three parts: two-frequency He-Ne laser, three heterodyne interferometers and three phase meters, respectively. Each heterodyne interferometer is used to measure the displacement of the magnetic levitation stage in the vertical direction. Then, the triplex heterodyne interferometer can realize the nanometer measurement of three degrees of freedom motion for the stage, that is, translation in the z-axis and rotations around the x- and y-axes. Furthermore, the three heterodyne interferometers have a common planar reflecting mirror, thus, the advantage of this measurement method is that the heterodyne interference can always produce within the travel range wherever the stage travels, this ensure the stage can always have the same height as that of desired position, and this measurement can give fine height consistency.
Conventional interference fringes counting methods often process two sinusoidal interference signals with a phase difference of π/2 to realize fringe-counting. But when the signals fluctuate in half a period of the signal, the conventional fringe-counting method sometimes produces direction-distinguishing mistakes, then resulting in counting errors. To address the problem, this paper presents a novel interference fringes counting method that uses software to distinguish the forward or backward direction of interference fringe and to count. This fringe-counting method can accurately distinguish the moving direction induced by the fluctuation of interference fringes, so it has the advantages of exact counting, intelligence and reliability. An experimental setup based on a Michelson interferometer is constructed to demonstrate the utility of this fringe-counting method for displacement measurement, and experimental results with a range of 1036mm is presented.
The recent progress in large-range and nanoscale micromotion stages is summarized, and a novel magnetic levitation stage that can provide large range motion with nanometer positioning accuracy is proposed in this paper. The construction, dynamics analysis, measurement system, and control strategy of this stage are presented and discussed.
KEYWORDS: Magnetism, Control systems, Neural networks, Mathematics, Mathematical modeling, Systems modeling, Evolutionary algorithms, Control systems design, Error analysis, Complex systems
The realization and capability of magnetic bearing principally depends on the design of controller. It is difficult to induce its precise mathematic model because the magnetic bearing has complex non-linearity. The classical PID control method focus on systems having precise mathematic models. The neural network control method does not need the precise mathematic model, and has entirely different information processing approach compared to the classical PID control. The neural network, based on the principles of self-adaptive and being-trained, has self-study capability, so it adapts to controlling a magnetic bearing system. In this paper, we simulate both the neural network PID control algorithm and the classical PID control algorithm with the disturbances of output force exist, and conclude that the neural network PID control is superior to the classical PID control in respect of adjusting time and overshooting values.
KEYWORDS: Nonlinear control, Thermal modeling, Performance modeling, Process control, Systems modeling, Control systems, Nonlinear dynamics, Process modeling, Chemical process control, Model-based design
Dyeing process is a serious nonlinear process, and can't be accurately controlled by traditional linear control algorithms. Generalized Predictive Control (GPC) based on linear model has good performance and strong robust, thus can be used to tacking the control problems with delay and unmodelled errors such as a thermal process for batch dyeing. In order to apply the good linear GPC to the nonlinear batch dyeing process, we introduce a Nonlinear Generalized Predictive Control (NLGPC) based on the Hammerstein model. The simulation results are given and it is concluded that the NLGPC control gives much better performance than the linear GPC.
We propose a novel multi-pickup and multi-disk drive, in which multiple optical disks are mounted on a spindle at a equal spacing and multiple optical pickups, whose quantity is equal to that of the data surfaces of the optical disks, simultaneously read or write data in parallel. The key part of the drive is its servo-control system, which controls these optical pickups in parallel to implement the focusing servo-control and the tracking servo-control of each optical pickup in real-time in order to ensure the correct data read or write. The drive is important solution to offer super-large-capacity and quick-data-access information storage.
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