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Dr. Bhooshan C. Popere
at DuPont Electronics & Industrial
SPIE Involvement:
Author
Publications (5)
Proceedings Article | 22 February 2021 Presentation + Paper
Design considerations for chemically amplified EUV resist materials
Emad Aqad, ChoongBong Lee, Suzanne Coley, Ke Yang, Li Cui, Manibarsha Goswami, Bhooshan Popere, Tomas Marangoni, James Cameron, James Thackeray
Proceedings Volume 11609, 116090I (2021) https://doi.org/10.1117/12.2583642
KEYWORDS: Extreme ultraviolet, Polymers, Absorption, Quantum efficiency, Imaging systems, Yield improvement, Systems modeling, Stochastic processes, Modulation, Lithography
Proceedings Article | 25 March 2019 Paper
High temperature spin on carbon materials with excellent planarization and CVD compatibility
Keren Zhang, Li Cui, Shintaro Yamada, Jim Cameron, Sabrina Wong, Lawrence Chen, Suzanne Coley, Dan Greene, Joshua Kaitz, Iou-Sheng Ke, Bhooshan Popere, Paul LaBeaume, Benjamin Foltz, Lei Zhang, Kenneth Kearns, Johnpeter Ngunjiri
Proceedings Volume 10960, 1096019 (2019) https://doi.org/10.1117/12.2514968
KEYWORDS: Chemical vapor deposition, Carbon, Polymers, Resistance, Coating, Etching, 193nm lithography, Materials
Proceedings Article | 25 March 2019 Paper
Ultra-thin conformal coating for spin-on doping applications
Mingqi Li, Bhooshan Popere, Peter Trefonas, Andrew Heitsch, Ratchana Limary, Reika Katsumata, Yuanyi Zhang, Rachel Segalman
Proceedings Volume 10960, 109600R (2019) https://doi.org/10.1117/12.2514830
KEYWORDS: Polymers, Doping, Coating, Silicon, Boron, Semiconducting wafers, Polymer thin films, Annealing, Semiconductors, Chemical species
Proceedings Article | 25 March 2019 Paper
Ordered polymer-based spin-on dopants
Bhooshan Popere, Peter Trefonas, Andrew Heitsch, Mingqi Li, Ratchana Limary, Megan Hoarfrost, Kiniharu Takei, Victor Ho, Ali Javey, Yuanyi Zhang, Reika Katsumata, Rachel Segalman
Proceedings Volume 10960, 1096023 (2019) https://doi.org/10.1117/12.2514822
KEYWORDS: Polymers, Silicon, Annealing, Doping, Polymer thin films, Boron, Chemical species, Diffusion, Ions, Antimony
Proceedings Article | 13 March 2018 Paper
The development of an SC1 removable si-anti-reflective-coating
Shintaro Yamada, Iou-Sheng Ke, Charlotte Cutler, Li Cui, Paul LaBeaume, Daniel Greene, Bhooshan Popere, Chris Sullivan, JoAnne Leonard, Suzanne Coley, Sabrina Wong, Owendi Ongayi, Jim Cameron, Michael Clark, Thomas Fitzgibbons
Proceedings Volume 10586, 105860L (2018) https://doi.org/10.1117/12.2297687
KEYWORDS: Etching, Dry etching, Lithography, Polymers, Reflectivity, Ion implantation
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