The optical and material properties of AJ309 electro-optic (EO) polymer were systematically studied with the objective
to fabricate an optimized integrated device. Both bottom and top cladding materials were developed at Lumera to
match the processibility of AJ309, and sustain high poling voltage needed for an effective poling process. A device
fabrication process is developed. The degree of crosslinking of the EO polymer before poling is minimized by
processing the top clad polymer at room-temperature. The UV-curable top clad has shown no detectable chemical
damage to the EO polymer after the deposition process of the top clad, thus maintaining the integrity of the interface
between top clad and AJ309 core. A 2.1 cm long active length Mach-Zehnder modulator with low half-wave voltage
(Vπ) of 1.1 V @1550 nm was fabricated using the AJ309 EO polymer and in-house cladding materials. Other device
parameters are also reported.
Hybrid sol-gel/polymer electro-optic modulators with horizontal taper structure have been designed and
fabricated. Optical transition between sol-gel passive waveguides and electro-optic polymer waveguides via horizontal
tapers has been realized in the electro-optic modulators. With 1cm interaction length these hybrid electro-optic
modulators have been measured to have a half-wave voltage of 8.91 V (dual drive 4.45 V), an extinction ration of
21.2dB and an optical insertion loss of 11.8 dB.
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